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- W2754475867 abstract "A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver." @default.
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- W2754475867 date "2017-01-01" @default.
- W2754475867 modified "2023-09-27" @default.
- W2754475867 title "Novel Hard Mask Fabrication Method for Hybrid Plasmonic Waveguide and Metasurfaces" @default.
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- W2754475867 doi "https://doi.org/10.1364/fio.2017.jtu2a.12" @default.
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