Matches in SemOpenAlex for { <https://semopenalex.org/work/W2759617622> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2759617622 endingPage "4" @default.
- W2759617622 startingPage "1" @default.
- W2759617622 abstract "We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97 fF/g (g = 9.8 m/s <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) over + 10 g range with a pull-in voltage of 6 V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm x 1.6 mm using GlobalFoundries' Inertial Measurement Unit (IMU) platform." @default.
- W2759617622 created "2017-10-06" @default.
- W2759617622 creator A5040351854 @default.
- W2759617622 creator A5041816488 @default.
- W2759617622 creator A5046968166 @default.
- W2759617622 date "2017-10-01" @default.
- W2759617622 modified "2023-09-27" @default.
- W2759617622 title "Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer" @default.
- W2759617622 cites W1516456390 @default.
- W2759617622 cites W1970486571 @default.
- W2759617622 cites W1972635104 @default.
- W2759617622 cites W1982848437 @default.
- W2759617622 cites W2009952409 @default.
- W2759617622 cites W2019768195 @default.
- W2759617622 cites W2072547210 @default.
- W2759617622 cites W2081873083 @default.
- W2759617622 cites W2100924946 @default.
- W2759617622 cites W2113351721 @default.
- W2759617622 cites W2135695382 @default.
- W2759617622 cites W2149128480 @default.
- W2759617622 cites W2164010209 @default.
- W2759617622 cites W2335728571 @default.
- W2759617622 cites W2529142900 @default.
- W2759617622 cites W2590421294 @default.
- W2759617622 cites W2983921147 @default.
- W2759617622 doi "https://doi.org/10.1109/lsens.2017.2756108" @default.
- W2759617622 hasPublicationYear "2017" @default.
- W2759617622 type Work @default.
- W2759617622 sameAs 2759617622 @default.
- W2759617622 citedByCount "11" @default.
- W2759617622 countsByYear W27596176222018 @default.
- W2759617622 countsByYear W27596176222020 @default.
- W2759617622 countsByYear W27596176222022 @default.
- W2759617622 countsByYear W27596176222023 @default.
- W2759617622 crossrefType "journal-article" @default.
- W2759617622 hasAuthorship W2759617622A5040351854 @default.
- W2759617622 hasAuthorship W2759617622A5041816488 @default.
- W2759617622 hasAuthorship W2759617622A5046968166 @default.
- W2759617622 hasConcept C117896860 @default.
- W2759617622 hasConcept C119599485 @default.
- W2759617622 hasConcept C121332964 @default.
- W2759617622 hasConcept C127413603 @default.
- W2759617622 hasConcept C146978453 @default.
- W2759617622 hasConcept C158488048 @default.
- W2759617622 hasConcept C173386949 @default.
- W2759617622 hasConcept C17525397 @default.
- W2759617622 hasConcept C206755178 @default.
- W2759617622 hasConcept C21200559 @default.
- W2759617622 hasConcept C24326235 @default.
- W2759617622 hasConcept C2780330379 @default.
- W2759617622 hasConcept C30066665 @default.
- W2759617622 hasConcept C62520636 @default.
- W2759617622 hasConcept C74650414 @default.
- W2759617622 hasConcept C79061980 @default.
- W2759617622 hasConcept C89805583 @default.
- W2759617622 hasConceptScore W2759617622C117896860 @default.
- W2759617622 hasConceptScore W2759617622C119599485 @default.
- W2759617622 hasConceptScore W2759617622C121332964 @default.
- W2759617622 hasConceptScore W2759617622C127413603 @default.
- W2759617622 hasConceptScore W2759617622C146978453 @default.
- W2759617622 hasConceptScore W2759617622C158488048 @default.
- W2759617622 hasConceptScore W2759617622C173386949 @default.
- W2759617622 hasConceptScore W2759617622C17525397 @default.
- W2759617622 hasConceptScore W2759617622C206755178 @default.
- W2759617622 hasConceptScore W2759617622C21200559 @default.
- W2759617622 hasConceptScore W2759617622C24326235 @default.
- W2759617622 hasConceptScore W2759617622C2780330379 @default.
- W2759617622 hasConceptScore W2759617622C30066665 @default.
- W2759617622 hasConceptScore W2759617622C62520636 @default.
- W2759617622 hasConceptScore W2759617622C74650414 @default.
- W2759617622 hasConceptScore W2759617622C79061980 @default.
- W2759617622 hasConceptScore W2759617622C89805583 @default.
- W2759617622 hasFunder F4320320742 @default.
- W2759617622 hasIssue "5" @default.
- W2759617622 hasLocation W27596176221 @default.
- W2759617622 hasOpenAccess W2759617622 @default.
- W2759617622 hasPrimaryLocation W27596176221 @default.
- W2759617622 hasRelatedWork W1501844198 @default.
- W2759617622 hasRelatedWork W1965527644 @default.
- W2759617622 hasRelatedWork W1974739050 @default.
- W2759617622 hasRelatedWork W2103620583 @default.
- W2759617622 hasRelatedWork W2156105229 @default.
- W2759617622 hasRelatedWork W2361925880 @default.
- W2759617622 hasRelatedWork W2739119237 @default.
- W2759617622 hasRelatedWork W2922271745 @default.
- W2759617622 hasRelatedWork W2177300481 @default.
- W2759617622 hasRelatedWork W2240452158 @default.
- W2759617622 hasVolume "1" @default.
- W2759617622 isParatext "false" @default.
- W2759617622 isRetracted "false" @default.
- W2759617622 magId "2759617622" @default.
- W2759617622 workType "article" @default.