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- W2760846594 abstract "Plasma diagnostics is a crucial tool for numerous of industrial processes using technical plasmas. For an effective process control, the determination of the process parameters at multiple positions inside the plasma reactor is required. Utilizing the concept of the multipole resonance probe (MRP), different parameters of low-pressure plasmas required for process control can be derived based on a single broadband measurement of the complex reflection coefficient. In this paper, we present a prototype electronics for fast and accurate reflection measurements of multiple probes based on linear frequency ramps. Its performance has been analyzed by measurements in the frequency range from 0.1 GHz to 5.5 GHz in case of different microwave filters. The results are in very good agreement with those obtained with a commercial vector network analyzer (VNA), whereas the sweep time of 1 ms is significantly shorter. The applicability of the prototype electronics for plasma diagnostics at multiple positions over a wide range of plasma process parameters has been demonstrated by measurements using a double inductively coupled plasma reactor." @default.
- W2760846594 created "2017-10-20" @default.
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- W2760846594 date "2017-06-01" @default.
- W2760846594 modified "2023-09-25" @default.
- W2760846594 title "Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes" @default.
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- W2760846594 doi "https://doi.org/10.1109/mwsym.2017.8058765" @default.
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