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- W2760865943 abstract "This paper highlights systematic fault isolation approaches to identify back-end of line metal bridging through the combination of techniques such as photon emission, soft defect localization, laser voltage probing as well as combinational logic analysis, to successfully pin point a single metal layer for physical failure analysis, thus boosting the overall success rate and turnaround time." @default.
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- W2760865943 date "2017-07-01" @default.
- W2760865943 modified "2023-09-25" @default.
- W2760865943 title "Systematic root cause analysis of metal defects in FINFET devices" @default.
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- W2760865943 doi "https://doi.org/10.1109/ipfa.2017.8060119" @default.
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