Matches in SemOpenAlex for { <https://semopenalex.org/work/W2761844111> ?p ?o ?g. }
- W2761844111 endingPage "9868" @default.
- W2761844111 startingPage "9863" @default.
- W2761844111 abstract "In this work, a special hyperbolic metamaterial (HMM) metamaterial is investigated for plasmonic lithography of period reduction patterns. It is a type II HMM (ϵ∥ < 0 and ϵ⊥ > 0) whose tangential component of the permittivity ϵ∥ is close to zero. Due to the high anisotropy of the type II epsilon-near-zero (ENZ) HMM, only one plasmonic mode can propagate horizontally with low loss in a waveguide system with ENZ HMM as its core. This work takes the advantage of a type II ENZ HMM composed of aluminum/aluminum oxide films and the associated unusual mode to expose a photoresist layer in a specially designed lithography system. Periodic patterns with a half pitch of 58.3 nm were achieved due to the interference of third-order diffracted light of the grating. The lines were 1/6 of the mask with a period of 700 nm and ∼1/7 of the wavelength of the incident light. Moreover, the theoretical analyses performed are widely applicable to structures made of different materials such as silver as well as systems working at deep ultraviolet wavelengths including 193, 248, and 365 nm." @default.
- W2761844111 created "2017-10-20" @default.
- W2761844111 creator A5001814451 @default.
- W2761844111 creator A5004549615 @default.
- W2761844111 creator A5008171524 @default.
- W2761844111 creator A5034430907 @default.
- W2761844111 creator A5040161343 @default.
- W2761844111 creator A5075596275 @default.
- W2761844111 date "2017-10-05" @default.
- W2761844111 modified "2023-09-28" @default.
- W2761844111 title "Plasmonic Lithography Utilizing Epsilon Near Zero Hyperbolic Metamaterial" @default.
- W2761844111 cites W1506093616 @default.
- W2761844111 cites W1507785428 @default.
- W2761844111 cites W1579783127 @default.
- W2761844111 cites W1918899533 @default.
- W2761844111 cites W1968433339 @default.
- W2761844111 cites W1995835696 @default.
- W2761844111 cites W2004237821 @default.
- W2761844111 cites W2015620100 @default.
- W2761844111 cites W2016767988 @default.
- W2761844111 cites W2044139179 @default.
- W2761844111 cites W2047159222 @default.
- W2761844111 cites W2074163997 @default.
- W2761844111 cites W2074791738 @default.
- W2761844111 cites W2084616899 @default.
- W2761844111 cites W2085572463 @default.
- W2761844111 cites W2088625008 @default.
- W2761844111 cites W2088993467 @default.
- W2761844111 cites W2093596311 @default.
- W2761844111 cites W2122765624 @default.
- W2761844111 cites W2133963805 @default.
- W2761844111 cites W2158988503 @default.
- W2761844111 cites W2159488517 @default.
- W2761844111 cites W2276352557 @default.
- W2761844111 cites W2337465486 @default.
- W2761844111 cites W2339361667 @default.
- W2761844111 cites W2368505379 @default.
- W2761844111 cites W2582568318 @default.
- W2761844111 cites W3098317778 @default.
- W2761844111 cites W3099984617 @default.
- W2761844111 cites W3101954364 @default.
- W2761844111 cites W3102282272 @default.
- W2761844111 cites W3106282130 @default.
- W2761844111 cites W4296862 @default.
- W2761844111 cites W4301319679 @default.
- W2761844111 cites W4376595525 @default.
- W2761844111 doi "https://doi.org/10.1021/acsnano.7b03584" @default.
- W2761844111 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28968069" @default.
- W2761844111 hasPublicationYear "2017" @default.
- W2761844111 type Work @default.
- W2761844111 sameAs 2761844111 @default.
- W2761844111 citedByCount "31" @default.
- W2761844111 countsByYear W27618441112018 @default.
- W2761844111 countsByYear W27618441112019 @default.
- W2761844111 countsByYear W27618441112020 @default.
- W2761844111 countsByYear W27618441112021 @default.
- W2761844111 countsByYear W27618441112022 @default.
- W2761844111 countsByYear W27618441112023 @default.
- W2761844111 crossrefType "journal-article" @default.
- W2761844111 hasAuthorship W2761844111A5001814451 @default.
- W2761844111 hasAuthorship W2761844111A5004549615 @default.
- W2761844111 hasAuthorship W2761844111A5008171524 @default.
- W2761844111 hasAuthorship W2761844111A5034430907 @default.
- W2761844111 hasAuthorship W2761844111A5040161343 @default.
- W2761844111 hasAuthorship W2761844111A5075596275 @default.
- W2761844111 hasConcept C105487726 @default.
- W2761844111 hasConcept C110367647 @default.
- W2761844111 hasConcept C110879396 @default.
- W2761844111 hasConcept C120665830 @default.
- W2761844111 hasConcept C121332964 @default.
- W2761844111 hasConcept C134406635 @default.
- W2761844111 hasConcept C136525101 @default.
- W2761844111 hasConcept C142724271 @default.
- W2761844111 hasConcept C159395582 @default.
- W2761844111 hasConcept C171250308 @default.
- W2761844111 hasConcept C192562407 @default.
- W2761844111 hasConcept C204223013 @default.
- W2761844111 hasConcept C204787440 @default.
- W2761844111 hasConcept C2777813233 @default.
- W2761844111 hasConcept C2779227376 @default.
- W2761844111 hasConcept C49040817 @default.
- W2761844111 hasConcept C6260449 @default.
- W2761844111 hasConcept C71924100 @default.
- W2761844111 hasConceptScore W2761844111C105487726 @default.
- W2761844111 hasConceptScore W2761844111C110367647 @default.
- W2761844111 hasConceptScore W2761844111C110879396 @default.
- W2761844111 hasConceptScore W2761844111C120665830 @default.
- W2761844111 hasConceptScore W2761844111C121332964 @default.
- W2761844111 hasConceptScore W2761844111C134406635 @default.
- W2761844111 hasConceptScore W2761844111C136525101 @default.
- W2761844111 hasConceptScore W2761844111C142724271 @default.
- W2761844111 hasConceptScore W2761844111C159395582 @default.
- W2761844111 hasConceptScore W2761844111C171250308 @default.
- W2761844111 hasConceptScore W2761844111C192562407 @default.
- W2761844111 hasConceptScore W2761844111C204223013 @default.
- W2761844111 hasConceptScore W2761844111C204787440 @default.
- W2761844111 hasConceptScore W2761844111C2777813233 @default.
- W2761844111 hasConceptScore W2761844111C2779227376 @default.