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• W2762453987 endingPage "116601" @default.
• W2762453987 startingPage "116601" @default.
• W2762453987 abstract "Boron and carbon codoped in polysilicon thin films and carbon implanted in silicon substrates have been examined by laser-assisted atom probe tomography (La-APT). Clusters of dopants were observed in annealed samples. Compared with the results obtained by secondary ion mass spectrometry (SIMS), significant miscounts of both boron and carbon were found in La-APT results. On the basis of measurements using two different La-APT systems, it was suggested that the insufficiency of the multihit capability of the detection systems is an important origin of the miscounts." @default.
• W2762453987 created "2017-10-20" @default.
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• W2762453987 date "2017-10-02" @default.
• W2762453987 modified "2023-09-23" @default.
• W2762453987 title "Quantitativeness in laser-assisted atom probe analysis of boron and carbon codoped in silicon" @default.
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• W2762453987 doi "https://doi.org/10.7567/jjap.56.116601" @default.
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