Matches in SemOpenAlex for { <https://semopenalex.org/work/W2763702962> ?p ?o ?g. }
- W2763702962 abstract "Abstract The non-equilibrium electro-thermodynamic properties of magnetized plasma produced by a modified radio-frequency magnetron sputtering system were investigated in detail. The plasma was analyzed using Hall, Langmuir, and Faraday probes and optical emission spectroscopy, and numerical simulations were conducted to determine the electric and magnetic field profiles. It is found that the occurrence of lower hybrid resonance and excitation of helicon waves are satisfied locally along the plasma profile (Z). This unusual effect in magnetron sputtering systems plays an important role in the increase of the electrons and ions temperature improving the quality of the films produced. Films of complex structure as hydroxyapatite that have biomedical applications were produced along the Z to confirm our plasma results. The films were characterized by performing grazing incidence X-ray diffraction using synchrotron radiation, X-ray photoelectron spectroscopy and atomic force microscopy. The microstructure analysis of hydroxyapatite films produced at different Z revealed that films with high crystallinities and with ideal stoichiometries (Ca/P = 1.67 ± 0.05) were produced within a magnetic cusp region (26 mm" @default.
- W2763702962 created "2017-10-20" @default.
- W2763702962 creator A5010310426 @default.
- W2763702962 creator A5025123788 @default.
- W2763702962 creator A5052711998 @default.
- W2763702962 creator A5084562029 @default.
- W2763702962 creator A5089325216 @default.
- W2763702962 date "2017-12-01" @default.
- W2763702962 modified "2023-10-10" @default.
- W2763702962 title "The role of lower hybrid resonance and helicon waves excitations in a magnetized plasma for coating production of complex crystalline structures as hydroxyapatite" @default.
- W2763702962 cites W1001389663 @default.
- W2763702962 cites W1133811778 @default.
- W2763702962 cites W1964989868 @default.
- W2763702962 cites W1973921176 @default.
- W2763702962 cites W1976412417 @default.
- W2763702962 cites W1984040921 @default.
- W2763702962 cites W1985162606 @default.
- W2763702962 cites W1987326993 @default.
- W2763702962 cites W1987436174 @default.
- W2763702962 cites W1988853039 @default.
- W2763702962 cites W1994143106 @default.
- W2763702962 cites W1999577949 @default.
- W2763702962 cites W2000126597 @default.
- W2763702962 cites W2005665653 @default.
- W2763702962 cites W2011194478 @default.
- W2763702962 cites W2012202041 @default.
- W2763702962 cites W2013496911 @default.
- W2763702962 cites W2034140556 @default.
- W2763702962 cites W2034953934 @default.
- W2763702962 cites W2038053527 @default.
- W2763702962 cites W2053956392 @default.
- W2763702962 cites W2054706248 @default.
- W2763702962 cites W2066415543 @default.
- W2763702962 cites W2068358902 @default.
- W2763702962 cites W2070318809 @default.
- W2763702962 cites W2073723055 @default.
- W2763702962 cites W2075504917 @default.
- W2763702962 cites W2081742188 @default.
- W2763702962 cites W2109606373 @default.
- W2763702962 cites W2139392047 @default.
- W2763702962 cites W2168921855 @default.
- W2763702962 cites W2324222717 @default.
- W2763702962 cites W2538671810 @default.
- W2763702962 doi "https://doi.org/10.1016/j.vacuum.2017.10.002" @default.
- W2763702962 hasPublicationYear "2017" @default.
- W2763702962 type Work @default.
- W2763702962 sameAs 2763702962 @default.
- W2763702962 citedByCount "4" @default.
- W2763702962 countsByYear W27637029622018 @default.
- W2763702962 countsByYear W27637029622019 @default.
- W2763702962 countsByYear W27637029622021 @default.
- W2763702962 crossrefType "journal-article" @default.
- W2763702962 hasAuthorship W2763702962A5010310426 @default.
- W2763702962 hasAuthorship W2763702962A5025123788 @default.
- W2763702962 hasAuthorship W2763702962A5052711998 @default.
- W2763702962 hasAuthorship W2763702962A5084562029 @default.
- W2763702962 hasAuthorship W2763702962A5089325216 @default.
- W2763702962 hasConcept C113196181 @default.
- W2763702962 hasConcept C121332964 @default.
- W2763702962 hasConcept C171250308 @default.
- W2763702962 hasConcept C175708663 @default.
- W2763702962 hasConcept C184779094 @default.
- W2763702962 hasConcept C185592680 @default.
- W2763702962 hasConcept C19067145 @default.
- W2763702962 hasConcept C192562407 @default.
- W2763702962 hasConcept C22423302 @default.
- W2763702962 hasConcept C2779123320 @default.
- W2763702962 hasConcept C32891209 @default.
- W2763702962 hasConcept C43617362 @default.
- W2763702962 hasConcept C46141821 @default.
- W2763702962 hasConcept C61427134 @default.
- W2763702962 hasConcept C62520636 @default.
- W2763702962 hasConcept C82706917 @default.
- W2763702962 hasConceptScore W2763702962C113196181 @default.
- W2763702962 hasConceptScore W2763702962C121332964 @default.
- W2763702962 hasConceptScore W2763702962C171250308 @default.
- W2763702962 hasConceptScore W2763702962C175708663 @default.
- W2763702962 hasConceptScore W2763702962C184779094 @default.
- W2763702962 hasConceptScore W2763702962C185592680 @default.
- W2763702962 hasConceptScore W2763702962C19067145 @default.
- W2763702962 hasConceptScore W2763702962C192562407 @default.
- W2763702962 hasConceptScore W2763702962C22423302 @default.
- W2763702962 hasConceptScore W2763702962C2779123320 @default.
- W2763702962 hasConceptScore W2763702962C32891209 @default.
- W2763702962 hasConceptScore W2763702962C43617362 @default.
- W2763702962 hasConceptScore W2763702962C46141821 @default.
- W2763702962 hasConceptScore W2763702962C61427134 @default.
- W2763702962 hasConceptScore W2763702962C62520636 @default.
- W2763702962 hasConceptScore W2763702962C82706917 @default.
- W2763702962 hasLocation W27637029621 @default.
- W2763702962 hasOpenAccess W2763702962 @default.
- W2763702962 hasPrimaryLocation W27637029621 @default.
- W2763702962 hasRelatedWork W1596971376 @default.
- W2763702962 hasRelatedWork W1642779664 @default.
- W2763702962 hasRelatedWork W1669298942 @default.
- W2763702962 hasRelatedWork W1971505481 @default.
- W2763702962 hasRelatedWork W1989237271 @default.
- W2763702962 hasRelatedWork W1991738434 @default.
- W2763702962 hasRelatedWork W1991960272 @default.
- W2763702962 hasRelatedWork W1997604314 @default.