Matches in SemOpenAlex for { <https://semopenalex.org/work/W2763786753> ?p ?o ?g. }
- W2763786753 abstract "Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review." @default.
- W2763786753 created "2017-10-20" @default.
- W2763786753 creator A5016012996 @default.
- W2763786753 creator A5031979730 @default.
- W2763786753 creator A5034918357 @default.
- W2763786753 creator A5061380692 @default.
- W2763786753 date "2014-02-06" @default.
- W2763786753 modified "2023-10-16" @default.
- W2763786753 title "Helium ion microscopy" @default.
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