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- W2763858009 abstract "Equipment productivity in semiconductor manufacturing has become a major topic due to high equipment prices. It is easier and more precise to calculate productivity based on the running logs; however, engineers may often be assigned to estimate the productivity of the equipment in the design phase to predict project benefits so that investment decisions can be made. In such situations, no running log is available to calculate equipment productivity. If the architecture of the equipment and the wafer flow are simple, equipment productivity still can be evaluated using algebra-based solutions. Unfortunately, with rapidly shrinking IC dimensions equipment architecture becomes more and more complicated so a linear platform is typically used. In a linear platform, multiple mainframes are used to install more chambers. In each main-frame, there may be multiple robots to enable efficient wafer transmission. It is very difficult to estimate the productivity of a linear platform using simple algebra-based solutions; however, accurate productivity estimation of a linear platform is critical due to its higher price. To address this problem, a novel estimative methodology is proposed in this paper. This method analyzes the potential wait time of a chamber and then identifies the productivity bottleneck of the platform. The proposed methodology is designed for calculating wafers per hour for the linear platform. The accuracy of the proposed methodology is then verified by a simulation model. By applying this methodology to estimate the productivity for a semiconductor manufacturing line incorrect equipment investment can be reduced, therefore enhancing market competitiveness." @default.
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- W2763858009 date "2017-11-01" @default.
- W2763858009 modified "2023-09-27" @default.
- W2763858009 title "Linear Platform Evaluation in Semiconductor Manufacturing" @default.
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- W2763858009 doi "https://doi.org/10.1109/tsm.2017.2759063" @default.
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