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- W2765653107 abstract "Spin-on-glass coatings for the generation of super-polished substrates for extreme ultraviolet optics Farhad Salmassi, Patrick P. Naulleau, and Eric M. Gullikson Center for X-Ray Optics, Lawrence Berkeley National Laboratory 1 Cyclotron Rd., Berkeley, CA 94720 Substrates intended for use as extreme ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when non-conventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating super-polished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3 to 3.7 nm range have been smoothed to the 0.4 to 0.6 nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 63%. OCIS codes: 220.5450, 220.1920, 230.4040, 230.4170, 310.1620, 340.7470, 260.7200 Introduction As extreme ultraviolet (EUV) lithography [1-3] approaches commercialization the need for development and metrology systems grows. The extremely tight finish requirements of EUV optics (typically less than 0.5-nm rms), renders optics with even loose figure specs, extremely expensive. Examples of such components are illuminator optics. High optic costs can often lead" @default.
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- W2765653107 date "2005-01-01" @default.
- W2765653107 modified "2023-09-27" @default.
- W2765653107 title "Spin-on-glass coatings for the generation of super-polished substrates for extreme ultraviolet optics - eScholarship" @default.
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