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• W2765668882 startingPage "27334" @default.
• W2765668882 abstract "Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000 with a modal volume of 0.77(λ/n)3. The fabricated cavities were measured using the resonance scattering technique and we demonstrated a measured Q of 120,000. The experimental spectra at different input power also indicate that the non-linear losses are negligible in this material platform." @default.
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• W2765668882 date "2017-10-23" @default.
• W2765668882 modified "2023-10-16" @default.
• W2765668882 title "Ultrahigh-Q photonic crystal cavities in silicon rich nitride" @default.
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• W2765668882 doi "https://doi.org/10.1364/oe.25.027334" @default.
• W2765668882 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29092209" @default.
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