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- W2765814494 abstract "This paper was studies about the effect of difference fabrication of TiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> nanoparticle sensor on surface morphological structure and electrical properties for detection of formaldehyde. Two type of deposition method are used to deposit TiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> nanoparticle layer on IDE/Si/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> substrate. The fabrication of IDE was done by using conventional photolithography process. In the second method, the solution TiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> was directly deposited by using e-beam evaporator. The fabricated of sensor was further validated through characterization on morphological surface inspection and electrical properties of the device. The roughness of TiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> film was demonstrated that the latter method is preferable due surface uniformity approximately 70 nm in grain size to provide resistance barrier to allow current flow when interface with the formaldehyde. The result was demonstrated by various measurement." @default.
- W2765814494 created "2017-11-10" @default.
- W2765814494 creator A5037989889 @default.
- W2765814494 creator A5042097446 @default.
- W2765814494 creator A5046327692 @default.
- W2765814494 creator A5087438853 @default.
- W2765814494 date "2017-08-01" @default.
- W2765814494 modified "2023-09-27" @default.
- W2765814494 title "Fabrication and characterization of titanium dioxide through different depositions method for detection of formaldehyde gas" @default.
- W2765814494 cites W1751074029 @default.
- W2765814494 cites W1998686036 @default.
- W2765814494 cites W1998984918 @default.
- W2765814494 cites W2010141779 @default.
- W2765814494 cites W2019259038 @default.
- W2765814494 cites W2039562656 @default.
- W2765814494 cites W2049114911 @default.
- W2765814494 cites W2094685983 @default.
- W2765814494 cites W2151110124 @default.
- W2765814494 cites W2204452251 @default.
- W2765814494 cites W2794400953 @default.
- W2765814494 doi "https://doi.org/10.1109/rsm.2017.8069132" @default.
- W2765814494 hasPublicationYear "2017" @default.
- W2765814494 type Work @default.
- W2765814494 sameAs 2765814494 @default.
- W2765814494 citedByCount "0" @default.
- W2765814494 crossrefType "proceedings-article" @default.
- W2765814494 hasAuthorship W2765814494A5037989889 @default.
- W2765814494 hasAuthorship W2765814494A5042097446 @default.
- W2765814494 hasAuthorship W2765814494A5046327692 @default.
- W2765814494 hasAuthorship W2765814494A5087438853 @default.
- W2765814494 hasConcept C111368507 @default.
- W2765814494 hasConcept C113196181 @default.
- W2765814494 hasConcept C127313418 @default.
- W2765814494 hasConcept C136525101 @default.
- W2765814494 hasConcept C142724271 @default.
- W2765814494 hasConcept C151730666 @default.
- W2765814494 hasConcept C171250308 @default.
- W2765814494 hasConcept C178790620 @default.
- W2765814494 hasConcept C185592680 @default.
- W2765814494 hasConcept C191897082 @default.
- W2765814494 hasConcept C192562407 @default.
- W2765814494 hasConcept C204787440 @default.
- W2765814494 hasConcept C2775930285 @default.
- W2765814494 hasConcept C2777289219 @default.
- W2765814494 hasConcept C2816523 @default.
- W2765814494 hasConcept C43617362 @default.
- W2765814494 hasConcept C506065880 @default.
- W2765814494 hasConcept C64297162 @default.
- W2765814494 hasConcept C71924100 @default.
- W2765814494 hasConcept C86803240 @default.
- W2765814494 hasConceptScore W2765814494C111368507 @default.
- W2765814494 hasConceptScore W2765814494C113196181 @default.
- W2765814494 hasConceptScore W2765814494C127313418 @default.
- W2765814494 hasConceptScore W2765814494C136525101 @default.
- W2765814494 hasConceptScore W2765814494C142724271 @default.
- W2765814494 hasConceptScore W2765814494C151730666 @default.
- W2765814494 hasConceptScore W2765814494C171250308 @default.
- W2765814494 hasConceptScore W2765814494C178790620 @default.
- W2765814494 hasConceptScore W2765814494C185592680 @default.
- W2765814494 hasConceptScore W2765814494C191897082 @default.
- W2765814494 hasConceptScore W2765814494C192562407 @default.
- W2765814494 hasConceptScore W2765814494C204787440 @default.
- W2765814494 hasConceptScore W2765814494C2775930285 @default.
- W2765814494 hasConceptScore W2765814494C2777289219 @default.
- W2765814494 hasConceptScore W2765814494C2816523 @default.
- W2765814494 hasConceptScore W2765814494C43617362 @default.
- W2765814494 hasConceptScore W2765814494C506065880 @default.
- W2765814494 hasConceptScore W2765814494C64297162 @default.
- W2765814494 hasConceptScore W2765814494C71924100 @default.
- W2765814494 hasConceptScore W2765814494C86803240 @default.
- W2765814494 hasLocation W27658144941 @default.
- W2765814494 hasOpenAccess W2765814494 @default.
- W2765814494 hasPrimaryLocation W27658144941 @default.
- W2765814494 hasRelatedWork W1485904692 @default.
- W2765814494 hasRelatedWork W1816244771 @default.
- W2765814494 hasRelatedWork W1978326929 @default.
- W2765814494 hasRelatedWork W2010778943 @default.
- W2765814494 hasRelatedWork W2059636064 @default.
- W2765814494 hasRelatedWork W2081689989 @default.
- W2765814494 hasRelatedWork W2503919811 @default.
- W2765814494 hasRelatedWork W2554190867 @default.
- W2765814494 hasRelatedWork W2947002969 @default.
- W2765814494 hasRelatedWork W3004249089 @default.
- W2765814494 isParatext "false" @default.
- W2765814494 isRetracted "false" @default.
- W2765814494 magId "2765814494" @default.
- W2765814494 workType "article" @default.