Matches in SemOpenAlex for { <https://semopenalex.org/work/W2765961540> ?p ?o ?g. }
- W2765961540 abstract "By applying certain types of tailored voltage waveforms to magnetized capacitively coupled plasmas, a direct current self-bias voltage is generated as known. Heating mode transition is observed when the magnetic field increases. In the absence of magnetic field, the electron energy distribution function (EEDF) is an increasing deviation from the Maxwellian distribution as the number of harmonics changes from 1 to 5. When applying the magnetic field, the EEDF turns into the Maxwellian distribution and the negative power absorption disappears at the magnetic field of 100 G. In addition, the plasma density and ion flux can be largely increased by increasing the number of harmonics and the magnetic field strength, while the ion energy can be adjusted in a certain range at one electrode and be kept low and relatively constant at the other electrode. These results are consistent with previous studies and indicate that such a configuration will separately control the ion flux and ion energy, as well as expand the operational parameter spaces." @default.
- W2765961540 created "2017-11-10" @default.
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- W2765961540 date "2017-10-20" @default.
- W2765961540 modified "2023-09-27" @default.
- W2765961540 title "Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms" @default.
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- W2765961540 doi "https://doi.org/10.1116/1.4990137" @default.
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