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- W2766208556 abstract "A series of ionic onium salt photoacid generators (PAGs) functionalized with epoxide or phenolic groups capable of participating in the cationic polymerization of epoxides have been synthesized and investigated for use in ultrahigh PAG loaded negative tone epoxide functionalized molecular resists. An epoxide functionalized PAG [tris(4-glycidylether-3,5-dimethylphenyl)sulfonium hexafluoroantimonate] was found to be capable of use at loadings up to 100 mol. % in an epoxide functionalized resist [1,1,2,2-tetrakis(4-(oxiran-2-ylmethoxy)phenyl)ethane (4-Ep)] without inhibiting its ability to form fully crosslinked features, and was able to resolve 50 nm features under 100 keV electron-beam lithography at PAG loadings exceeding 50 mol. %. A phenol functionalized PAG [tris(4-hydroxyphenyl)sulfonium hexafluoroantimonate] was similarly capable of use at loadings up to 50 mol. % in 4-Ep without inhibiting cross-linking, and was able to resolve both 50 and sub-50 nm features at PAG loadings exceeding 30 mol. % using 100 keV electron-beam lithography. Initial results from this study indicate that the functionalized PAGs can enable higher PAG loadings in these negative tone resists than was previously possible; however, increasing PAG loading beyond at least 30 mol. % has a negative impact on sensitivity when using 100-keV high energy e-beam exposures." @default.
- W2766208556 created "2017-11-10" @default.
- W2766208556 creator A5010046244 @default.
- W2766208556 creator A5027096922 @default.
- W2766208556 creator A5034813557 @default.
- W2766208556 creator A5043469978 @default.
- W2766208556 date "2017-11-01" @default.
- W2766208556 modified "2023-10-15" @default.
- W2766208556 title "Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists" @default.
- W2766208556 cites W1970487387 @default.
- W2766208556 cites W1980604903 @default.
- W2766208556 cites W1982343946 @default.
- W2766208556 cites W1996823627 @default.
- W2766208556 cites W2006319012 @default.
- W2766208556 cites W2014948129 @default.
- W2766208556 cites W2021361564 @default.
- W2766208556 cites W2031264071 @default.
- W2766208556 cites W2032210131 @default.
- W2766208556 cites W2040829271 @default.
- W2766208556 cites W2066368851 @default.
- W2766208556 cites W2118795336 @default.
- W2766208556 cites W2158932412 @default.
- W2766208556 cites W2329637055 @default.
- W2766208556 cites W4234620423 @default.
- W2766208556 doi "https://doi.org/10.1116/1.4991894" @default.
- W2766208556 hasPublicationYear "2017" @default.
- W2766208556 type Work @default.
- W2766208556 sameAs 2766208556 @default.
- W2766208556 citedByCount "2" @default.
- W2766208556 countsByYear W27662085562018 @default.
- W2766208556 countsByYear W27662085562020 @default.
- W2766208556 crossrefType "journal-article" @default.
- W2766208556 hasAuthorship W2766208556A5010046244 @default.
- W2766208556 hasAuthorship W2766208556A5027096922 @default.
- W2766208556 hasAuthorship W2766208556A5034813557 @default.
- W2766208556 hasAuthorship W2766208556A5043469978 @default.
- W2766208556 hasConcept C161790260 @default.
- W2766208556 hasConcept C178790620 @default.
- W2766208556 hasConcept C183882617 @default.
- W2766208556 hasConcept C185592680 @default.
- W2766208556 hasConcept C188027245 @default.
- W2766208556 hasConcept C200274948 @default.
- W2766208556 hasConcept C2776371256 @default.
- W2766208556 hasConcept C2776920199 @default.
- W2766208556 hasConcept C2777040163 @default.
- W2766208556 hasConcept C2779227376 @default.
- W2766208556 hasConcept C53524968 @default.
- W2766208556 hasConcept C75473681 @default.
- W2766208556 hasConceptScore W2766208556C161790260 @default.
- W2766208556 hasConceptScore W2766208556C178790620 @default.
- W2766208556 hasConceptScore W2766208556C183882617 @default.
- W2766208556 hasConceptScore W2766208556C185592680 @default.
- W2766208556 hasConceptScore W2766208556C188027245 @default.
- W2766208556 hasConceptScore W2766208556C200274948 @default.
- W2766208556 hasConceptScore W2766208556C2776371256 @default.
- W2766208556 hasConceptScore W2766208556C2776920199 @default.
- W2766208556 hasConceptScore W2766208556C2777040163 @default.
- W2766208556 hasConceptScore W2766208556C2779227376 @default.
- W2766208556 hasConceptScore W2766208556C53524968 @default.
- W2766208556 hasConceptScore W2766208556C75473681 @default.
- W2766208556 hasFunder F4320306076 @default.
- W2766208556 hasIssue "6" @default.
- W2766208556 hasLocation W27662085561 @default.
- W2766208556 hasOpenAccess W2766208556 @default.
- W2766208556 hasPrimaryLocation W27662085561 @default.
- W2766208556 hasRelatedWork W2008347897 @default.
- W2766208556 hasRelatedWork W2011729688 @default.
- W2766208556 hasRelatedWork W2073607522 @default.
- W2766208556 hasRelatedWork W2120224558 @default.
- W2766208556 hasRelatedWork W2220699902 @default.
- W2766208556 hasRelatedWork W2372028063 @default.
- W2766208556 hasRelatedWork W2434182407 @default.
- W2766208556 hasRelatedWork W2885501023 @default.
- W2766208556 hasRelatedWork W2951690568 @default.
- W2766208556 hasRelatedWork W3010953699 @default.
- W2766208556 hasVolume "35" @default.
- W2766208556 isParatext "false" @default.
- W2766208556 isRetracted "false" @default.
- W2766208556 magId "2766208556" @default.
- W2766208556 workType "article" @default.