FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2766572391> ?p ?o ?g. }

• W2766572391 endingPage "041302" @default.
• W2766572391 startingPage "041302" @default.
• W2766572391 abstract "Given the vast number of strategies used to control the behavior of laboratory and industrially relevant plasmas for material processing and other state-of-the-art applications, a potential user may find themselves overwhelmed with the diversity of physical configurations used to generate and control plasmas. Apparently, a need for clearly defined, physics-based classification of the presently available spectrum of plasma technologies is pressing, and the critically summary of the individual advantages, unique benefits, and challenges against key application criteria is a vital prerequisite for the further progress. To facilitate selection of the technological solutions that provide the best match to the needs of the end user, this work systematically explores plasma setups, focusing on the most significant family of the processes—control of plasma fluxes—which determine the distribution and delivery of mass and energy to the surfaces of materials being processed and synthesized. A novel classification based on the incorporation of substrates into plasma-generating circuitry is also proposed and illustrated by its application to a wide variety of plasma reactors, where the effect of substrate incorporation on the plasma fluxes is emphasized. With the key process and material parameters, such as growth and modification rates, phase transitions, crystallinity, density of lattice defects, and others being linked to plasma and energy fluxes, this review offers direction to physicists, engineers, and materials scientists engaged in the design and development of instrumentation for plasma processing and diagnostics, where the selection of the correct tools is critical for the advancement of emerging and high-performance applications." @default.
• W2766572391 created "2017-11-10" @default.
• W2766572391 creator A5015106238 @default.
• W2766572391 creator A5025809599 @default.
• W2766572391 creator A5031893720 @default.
• W2766572391 creator A5040978864 @default.
• W2766572391 creator A5042249475 @default.
• W2766572391 creator A5051463344 @default.
• W2766572391 creator A5082311067 @default.
• W2766572391 date "2017-12-01" @default.
• W2766572391 modified "2023-10-03" @default.
• W2766572391 title "Plasma under control: Advanced solutions and perspectives for plasma flux management in material treatment and nanosynthesis" @default.
• W2766572391 cites W1026406348 @default.
• W2766572391 cites W1504175299 @default.
• W2766572391 cites W1506598084 @default.
• W2766572391 cites W1540293398 @default.
• W2766572391 cites W1806898172 @default.
• W2766572391 cites W1842914115 @default.
• W2766572391 cites W1925863050 @default.
• W2766572391 cites W1942869182 @default.
• W2766572391 cites W1969613005 @default.
• W2766572391 cites W1970543977 @default.
• W2766572391 cites W1971995833 @default.
• W2766572391 cites W1973913422 @default.
• W2766572391 cites W1975993278 @default.
• W2766572391 cites W1978519609 @default.
• W2766572391 cites W1978748702 @default.
• W2766572391 cites W1979539753 @default.
• W2766572391 cites W1979677280 @default.
• W2766572391 cites W1981966175 @default.
• W2766572391 cites W1982782390 @default.
• W2766572391 cites W1983857781 @default.
• W2766572391 cites W1984599581 @default.
• W2766572391 cites W1989321355 @default.
• W2766572391 cites W1992455159 @default.
• W2766572391 cites W1993089004 @default.
• W2766572391 cites W1993277415 @default.
• W2766572391 cites W1994142347 @default.
• W2766572391 cites W1996319866 @default.
• W2766572391 cites W1997798476 @default.
• W2766572391 cites W1998544721 @default.
• W2766572391 cites W1999793052 @default.
• W2766572391 cites W2003682374 @default.
• W2766572391 cites W2005397299 @default.
• W2766572391 cites W2010512103 @default.
• W2766572391 cites W2011112732 @default.
• W2766572391 cites W2011388567 @default.
• W2766572391 cites W2012176666 @default.
• W2766572391 cites W2014649927 @default.
• W2766572391 cites W2015936846 @default.
• W2766572391 cites W2017898691 @default.
• W2766572391 cites W2018202556 @default.
• W2766572391 cites W2018402396 @default.
• W2766572391 cites W2019791056 @default.
• W2766572391 cites W2019852094 @default.
• W2766572391 cites W2024227324 @default.
• W2766572391 cites W2024687084 @default.
• W2766572391 cites W2025790634 @default.
• W2766572391 cites W2027279308 @default.
• W2766572391 cites W2029498957 @default.
• W2766572391 cites W2029826158 @default.
• W2766572391 cites W2030970608 @default.
• W2766572391 cites W2032326440 @default.
• W2766572391 cites W2032719216 @default.
• W2766572391 cites W2034284324 @default.
• W2766572391 cites W2036438160 @default.
• W2766572391 cites W2039178925 @default.
• W2766572391 cites W2041121456 @default.
• W2766572391 cites W2041898219 @default.
• W2766572391 cites W2043672655 @default.
• W2766572391 cites W2043741901 @default.
• W2766572391 cites W2049350022 @default.
• W2766572391 cites W2050183138 @default.
• W2766572391 cites W2052668240 @default.
• W2766572391 cites W2057459980 @default.
• W2766572391 cites W2058296132 @default.
• W2766572391 cites W2060500268 @default.
• W2766572391 cites W2063607874 @default.
• W2766572391 cites W2064139603 @default.
• W2766572391 cites W2064225736 @default.
• W2766572391 cites W2065138335 @default.
• W2766572391 cites W2065807112 @default.
• W2766572391 cites W2066508380 @default.
• W2766572391 cites W2068552998 @default.
• W2766572391 cites W2068774051 @default.
• W2766572391 cites W2070483078 @default.
• W2766572391 cites W2072659496 @default.
• W2766572391 cites W2074845192 @default.
• W2766572391 cites W2074898591 @default.
• W2766572391 cites W2075972333 @default.
• W2766572391 cites W2078900749 @default.
• W2766572391 cites W2080359166 @default.
• W2766572391 cites W2080693462 @default.
• W2766572391 cites W2081004085 @default.
• W2766572391 cites W2081687254 @default.
• W2766572391 cites W2084461123 @default.
• W2766572391 cites W2086848418 @default.
• W2766572391 cites W2090139697 @default.

• next