Matches in SemOpenAlex for { <https://semopenalex.org/work/W2767029353> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2767029353 abstract "We present in-situ stress measurement results for single and multilayer thin-films deposited by magnetron sputtering. In particular, we report on the influence of the material interfaces on the ensuing stress in both the transient and steady-state regimes of film growth. This behavior is used to determine the appropriate thicknesses of the constituent layers that will result in a net tensile stress in multilayers composed of various material combinations. These multilayers can then be used to compensate the compressive integrated stress in single and multilayer EUV and x-ray optical coatings. The use of multilayers to compensate the integrated stress might be advantageous because, unlike single layers of chromium, the roughness is not expected to increase with the total thickness of the multilayer. In this paper, we demonstrate the technique for W/Si and Mo/Si multilayers and discuss its application to other material combinations." @default.
- W2767029353 created "2017-11-10" @default.
- W2767029353 creator A5015264595 @default.
- W2767029353 creator A5047528307 @default.
- W2767029353 creator A5055588693 @default.
- W2767029353 creator A5087900728 @default.
- W2767029353 date "2017-08-06" @default.
- W2767029353 modified "2023-10-08" @default.
- W2767029353 title "Stress Compensating Multilayers" @default.
- W2767029353 cites W1959341867 @default.
- W2767029353 cites W2088950431 @default.
- W2767029353 cites W2092448794 @default.
- W2767029353 hasPublicationYear "2017" @default.
- W2767029353 type Work @default.
- W2767029353 sameAs 2767029353 @default.
- W2767029353 citedByCount "0" @default.
- W2767029353 crossrefType "journal-article" @default.
- W2767029353 hasAuthorship W2767029353A5015264595 @default.
- W2767029353 hasAuthorship W2767029353A5047528307 @default.
- W2767029353 hasAuthorship W2767029353A5055588693 @default.
- W2767029353 hasAuthorship W2767029353A5087900728 @default.
- W2767029353 hasConcept C112950240 @default.
- W2767029353 hasConcept C120665830 @default.
- W2767029353 hasConcept C121332964 @default.
- W2767029353 hasConcept C138885662 @default.
- W2767029353 hasConcept C159985019 @default.
- W2767029353 hasConcept C162996421 @default.
- W2767029353 hasConcept C171250308 @default.
- W2767029353 hasConcept C19067145 @default.
- W2767029353 hasConcept C192562407 @default.
- W2767029353 hasConcept C21036866 @default.
- W2767029353 hasConcept C22423302 @default.
- W2767029353 hasConcept C41895202 @default.
- W2767029353 hasConcept C49040817 @default.
- W2767029353 hasConcept C61427134 @default.
- W2767029353 hasConcept C71039073 @default.
- W2767029353 hasConcept C71597924 @default.
- W2767029353 hasConceptScore W2767029353C112950240 @default.
- W2767029353 hasConceptScore W2767029353C120665830 @default.
- W2767029353 hasConceptScore W2767029353C121332964 @default.
- W2767029353 hasConceptScore W2767029353C138885662 @default.
- W2767029353 hasConceptScore W2767029353C159985019 @default.
- W2767029353 hasConceptScore W2767029353C162996421 @default.
- W2767029353 hasConceptScore W2767029353C171250308 @default.
- W2767029353 hasConceptScore W2767029353C19067145 @default.
- W2767029353 hasConceptScore W2767029353C192562407 @default.
- W2767029353 hasConceptScore W2767029353C21036866 @default.
- W2767029353 hasConceptScore W2767029353C22423302 @default.
- W2767029353 hasConceptScore W2767029353C41895202 @default.
- W2767029353 hasConceptScore W2767029353C49040817 @default.
- W2767029353 hasConceptScore W2767029353C61427134 @default.
- W2767029353 hasConceptScore W2767029353C71039073 @default.
- W2767029353 hasConceptScore W2767029353C71597924 @default.
- W2767029353 hasLocation W27670293531 @default.
- W2767029353 hasOpenAccess W2767029353 @default.
- W2767029353 hasPrimaryLocation W27670293531 @default.
- W2767029353 hasRelatedWork W1711257288 @default.
- W2767029353 hasRelatedWork W1971993454 @default.
- W2767029353 hasRelatedWork W1976743557 @default.
- W2767029353 hasRelatedWork W2005676445 @default.
- W2767029353 hasRelatedWork W2007711814 @default.
- W2767029353 hasRelatedWork W2028685597 @default.
- W2767029353 hasRelatedWork W2058827976 @default.
- W2767029353 hasRelatedWork W2075805554 @default.
- W2767029353 hasRelatedWork W2101657247 @default.
- W2767029353 hasRelatedWork W2123323099 @default.
- W2767029353 hasRelatedWork W2132610546 @default.
- W2767029353 hasRelatedWork W2166943584 @default.
- W2767029353 hasRelatedWork W2430041590 @default.
- W2767029353 hasRelatedWork W2509584184 @default.
- W2767029353 hasRelatedWork W2887005119 @default.
- W2767029353 hasRelatedWork W2900202252 @default.
- W2767029353 hasRelatedWork W2913388408 @default.
- W2767029353 hasRelatedWork W2990123647 @default.
- W2767029353 hasRelatedWork W3009289497 @default.
- W2767029353 hasRelatedWork W2842741741 @default.
- W2767029353 isParatext "false" @default.
- W2767029353 isRetracted "false" @default.
- W2767029353 magId "2767029353" @default.
- W2767029353 workType "article" @default.