Matches in SemOpenAlex for { <https://semopenalex.org/work/W2767041480> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2767041480 abstract "This paper reports a 80nm air gap double-ended tuning fork (DETF) resonator partially filled with 20nm of HfO 2 . The device operates at 10.7 MHz with a quality Q-factor of 7930 and a motional resistance, R m , x18 better than for the measured counterparts in air-gaps. An enhancement of the S 21 transmission signal of 6dB in addition to the reduction of the R m have been achieved thanks to the improvement of the electromechanical coupling factor by partially filling the electrode-to-resonator-gap with an atomic layer deposition (ALD) of 20nm of HfO 2 high-k dielectric (e r ∼19). This result proves an outstanding enhancement in the detection signal while keeping all the desired properties of flexural resonators for future mechanical sensing applications." @default.
- W2767041480 created "2017-11-10" @default.
- W2767041480 creator A5031321968 @default.
- W2767041480 creator A5053654772 @default.
- W2767041480 creator A5064694629 @default.
- W2767041480 creator A5070184946 @default.
- W2767041480 date "2017-07-01" @default.
- W2767041480 modified "2023-09-30" @default.
- W2767041480 title "Lowering motional resistance by partially HfO<inf>2</inf> gap filling in double-ended tuning fork MEMS resonators" @default.
- W2767041480 cites W1840625940 @default.
- W2767041480 cites W2003661721 @default.
- W2767041480 cites W2005185797 @default.
- W2767041480 doi "https://doi.org/10.1109/fcs.2017.8089040" @default.
- W2767041480 hasPublicationYear "2017" @default.
- W2767041480 type Work @default.
- W2767041480 sameAs 2767041480 @default.
- W2767041480 citedByCount "0" @default.
- W2767041480 crossrefType "proceedings-article" @default.
- W2767041480 hasAuthorship W2767041480A5031321968 @default.
- W2767041480 hasAuthorship W2767041480A5053654772 @default.
- W2767041480 hasAuthorship W2767041480A5064694629 @default.
- W2767041480 hasAuthorship W2767041480A5070184946 @default.
- W2767041480 hasConcept C107677527 @default.
- W2767041480 hasConcept C121332964 @default.
- W2767041480 hasConcept C133386390 @default.
- W2767041480 hasConcept C159985019 @default.
- W2767041480 hasConcept C17525397 @default.
- W2767041480 hasConcept C187725362 @default.
- W2767041480 hasConcept C192562407 @default.
- W2767041480 hasConcept C198394728 @default.
- W2767041480 hasConcept C199360897 @default.
- W2767041480 hasConcept C24890656 @default.
- W2767041480 hasConcept C2779227376 @default.
- W2767041480 hasConcept C2779843651 @default.
- W2767041480 hasConcept C37977207 @default.
- W2767041480 hasConcept C41008148 @default.
- W2767041480 hasConcept C49040817 @default.
- W2767041480 hasConcept C50587689 @default.
- W2767041480 hasConcept C62520636 @default.
- W2767041480 hasConcept C69544855 @default.
- W2767041480 hasConcept C97126364 @default.
- W2767041480 hasConceptScore W2767041480C107677527 @default.
- W2767041480 hasConceptScore W2767041480C121332964 @default.
- W2767041480 hasConceptScore W2767041480C133386390 @default.
- W2767041480 hasConceptScore W2767041480C159985019 @default.
- W2767041480 hasConceptScore W2767041480C17525397 @default.
- W2767041480 hasConceptScore W2767041480C187725362 @default.
- W2767041480 hasConceptScore W2767041480C192562407 @default.
- W2767041480 hasConceptScore W2767041480C198394728 @default.
- W2767041480 hasConceptScore W2767041480C199360897 @default.
- W2767041480 hasConceptScore W2767041480C24890656 @default.
- W2767041480 hasConceptScore W2767041480C2779227376 @default.
- W2767041480 hasConceptScore W2767041480C2779843651 @default.
- W2767041480 hasConceptScore W2767041480C37977207 @default.
- W2767041480 hasConceptScore W2767041480C41008148 @default.
- W2767041480 hasConceptScore W2767041480C49040817 @default.
- W2767041480 hasConceptScore W2767041480C50587689 @default.
- W2767041480 hasConceptScore W2767041480C62520636 @default.
- W2767041480 hasConceptScore W2767041480C69544855 @default.
- W2767041480 hasConceptScore W2767041480C97126364 @default.
- W2767041480 hasLocation W27670414801 @default.
- W2767041480 hasOpenAccess W2767041480 @default.
- W2767041480 hasPrimaryLocation W27670414801 @default.
- W2767041480 hasRelatedWork W1992071730 @default.
- W2767041480 hasRelatedWork W2015785720 @default.
- W2767041480 hasRelatedWork W2033150924 @default.
- W2767041480 hasRelatedWork W2042844923 @default.
- W2767041480 hasRelatedWork W2182966584 @default.
- W2767041480 hasRelatedWork W2212682116 @default.
- W2767041480 hasRelatedWork W2523493474 @default.
- W2767041480 hasRelatedWork W2591631096 @default.
- W2767041480 hasRelatedWork W2908747298 @default.
- W2767041480 hasRelatedWork W2909399546 @default.
- W2767041480 hasRelatedWork W2909934350 @default.
- W2767041480 hasRelatedWork W2978024512 @default.
- W2767041480 hasRelatedWork W3012115979 @default.
- W2767041480 hasRelatedWork W3015744711 @default.
- W2767041480 hasRelatedWork W3046071670 @default.
- W2767041480 hasRelatedWork W3094234709 @default.
- W2767041480 hasRelatedWork W3137940151 @default.
- W2767041480 hasRelatedWork W1808924100 @default.
- W2767041480 hasRelatedWork W2248565818 @default.
- W2767041480 hasRelatedWork W2506155661 @default.
- W2767041480 isParatext "false" @default.
- W2767041480 isRetracted "false" @default.
- W2767041480 magId "2767041480" @default.
- W2767041480 workType "article" @default.