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- W2767595868 abstract "Abstract In this paper, we present different optical metrology approaches for the investigation of buried technical structures. Contactless, potentially fast and non-destructive techniques such as optical beam induced current (OBIC), confocal laser scanning microscopy (CLSM) and digital holographic microscopy (DHM) are described. Their properties are illustrated by investigating the buried structures of a microcontroller." @default.
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- W2767595868 date "2017-11-07" @default.
- W2767595868 modified "2023-10-18" @default.
- W2767595868 title "Optical metrology for the investigation of buried technical structures" @default.
- W2767595868 doi "https://doi.org/10.1515/teme-2017-0096" @default.
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