Matches in SemOpenAlex for { <https://semopenalex.org/work/W2768057091> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2768057091 endingPage "22" @default.
- W2768057091 startingPage "15" @default.
- W2768057091 abstract "Uniaxially strained Si1−xGex channels have been proposed as a solution for high mobility channels in next-generation MOSFETS to ensure continued device improvement as the benefits from further miniaturisation are diminishing. Previously proposed techniques to deposit uniaxially strained Si1−xGex epilayers on Si (0 0 1) substrates require multiple deposition steps and only yielded thin strips of uniaxially strained films. A lateral liquid-phase epitaxy (LLPE) technique was developed to deposit a blanket epilayer of asymmetrically strained Si97.4Ge2.6 on Si in a single step, where the epilayer was fully strained in the growth direction and 31% strain-relaxed in the orthogonal direction. The LLPE technique promoted the glide of misfit dislocations, which nucleated in a region with an orthogonal misfit dislocation network, into a region where the dislocation nucleation was inhibited. This created an array of parallel misfit dislocations which were the source of the asymmetric strain. By observing the thicknesses at which the dislocation network transitions from orthogonal to parallel and at which point dislocation glide is exhausted, the separate critical thicknesses for dislocation nucleation and dislocation glide can be determined." @default.
- W2768057091 created "2017-11-17" @default.
- W2768057091 creator A5010710848 @default.
- W2768057091 creator A5019068145 @default.
- W2768057091 date "2018-01-01" @default.
- W2768057091 modified "2023-09-26" @default.
- W2768057091 title "Asymmetric, compressive, SiGe epilayers on Si grown by lateral liquid-phase epitaxy utilizing a distinction between dislocation nucleation and glide critical thicknesses" @default.
- W2768057091 cites W1963559021 @default.
- W2768057091 cites W1964157657 @default.
- W2768057091 cites W1966941276 @default.
- W2768057091 cites W1973075294 @default.
- W2768057091 cites W1978248550 @default.
- W2768057091 cites W1990514401 @default.
- W2768057091 cites W1995084950 @default.
- W2768057091 cites W2013145445 @default.
- W2768057091 cites W2015439854 @default.
- W2768057091 cites W2016785852 @default.
- W2768057091 cites W2031344223 @default.
- W2768057091 cites W2032611807 @default.
- W2768057091 cites W2039099056 @default.
- W2768057091 cites W2042623839 @default.
- W2768057091 cites W2047458253 @default.
- W2768057091 cites W2055176561 @default.
- W2768057091 cites W2056540221 @default.
- W2768057091 cites W2064162550 @default.
- W2768057091 cites W2078488034 @default.
- W2768057091 cites W2078510598 @default.
- W2768057091 cites W2086077069 @default.
- W2768057091 cites W2087350651 @default.
- W2768057091 cites W2103951631 @default.
- W2768057091 cites W2109163709 @default.
- W2768057091 cites W2109523569 @default.
- W2768057091 cites W2125942389 @default.
- W2768057091 cites W2135674775 @default.
- W2768057091 cites W2167903456 @default.
- W2768057091 cites W2325871462 @default.
- W2768057091 cites W2589112234 @default.
- W2768057091 doi "https://doi.org/10.1016/j.jcrysgro.2017.10.038" @default.
- W2768057091 hasPublicationYear "2018" @default.
- W2768057091 type Work @default.
- W2768057091 sameAs 2768057091 @default.
- W2768057091 citedByCount "6" @default.
- W2768057091 countsByYear W27680570912018 @default.
- W2768057091 countsByYear W27680570912019 @default.
- W2768057091 countsByYear W27680570912020 @default.
- W2768057091 crossrefType "journal-article" @default.
- W2768057091 hasAuthorship W2768057091A5010710848 @default.
- W2768057091 hasAuthorship W2768057091A5019068145 @default.
- W2768057091 hasConcept C110738630 @default.
- W2768057091 hasConcept C121332964 @default.
- W2768057091 hasConcept C159122135 @default.
- W2768057091 hasConcept C159985019 @default.
- W2768057091 hasConcept C178790620 @default.
- W2768057091 hasConcept C185592680 @default.
- W2768057091 hasConcept C192562407 @default.
- W2768057091 hasConcept C26873012 @default.
- W2768057091 hasConcept C2779227376 @default.
- W2768057091 hasConcept C44280652 @default.
- W2768057091 hasConcept C49040817 @default.
- W2768057091 hasConcept C61048295 @default.
- W2768057091 hasConcept C8010536 @default.
- W2768057091 hasConceptScore W2768057091C110738630 @default.
- W2768057091 hasConceptScore W2768057091C121332964 @default.
- W2768057091 hasConceptScore W2768057091C159122135 @default.
- W2768057091 hasConceptScore W2768057091C159985019 @default.
- W2768057091 hasConceptScore W2768057091C178790620 @default.
- W2768057091 hasConceptScore W2768057091C185592680 @default.
- W2768057091 hasConceptScore W2768057091C192562407 @default.
- W2768057091 hasConceptScore W2768057091C26873012 @default.
- W2768057091 hasConceptScore W2768057091C2779227376 @default.
- W2768057091 hasConceptScore W2768057091C44280652 @default.
- W2768057091 hasConceptScore W2768057091C49040817 @default.
- W2768057091 hasConceptScore W2768057091C61048295 @default.
- W2768057091 hasConceptScore W2768057091C8010536 @default.
- W2768057091 hasLocation W27680570911 @default.
- W2768057091 hasOpenAccess W2768057091 @default.
- W2768057091 hasPrimaryLocation W27680570911 @default.
- W2768057091 hasRelatedWork W186448132 @default.
- W2768057091 hasRelatedWork W1964285687 @default.
- W2768057091 hasRelatedWork W2005908287 @default.
- W2768057091 hasRelatedWork W2043459017 @default.
- W2768057091 hasRelatedWork W2049680282 @default.
- W2768057091 hasRelatedWork W2089994852 @default.
- W2768057091 hasRelatedWork W2171670411 @default.
- W2768057091 hasRelatedWork W2768057091 @default.
- W2768057091 hasRelatedWork W317256992 @default.
- W2768057091 hasRelatedWork W3207775691 @default.
- W2768057091 hasVolume "482" @default.
- W2768057091 isParatext "false" @default.
- W2768057091 isRetracted "false" @default.
- W2768057091 magId "2768057091" @default.
- W2768057091 workType "article" @default.