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• W2769646273 endingPage "181" @default.
• W2769646273 startingPage "173" @default.
• W2769646273 abstract "Photoacid generators (PAGs) with environmentally friendly cores and partially fluorinated sulfonate salts have been synthesized and studied. The cores were based on naturally occurring compounds such as cholesterol and glucose and were functionalized with a biodegradable octafluoro-3-oxapentanesulfonate. These PAGs were soluble in common spinning solvents and lithographically characterized with poly(styrene-co-4-hydroxy-styrene-co-tert-butylacetate) photoresist, and they showed higher resolution for photoresist applications than a perfluorooctane sulfonate (PFOS)-based triphenylsulfonium salt PAG, capable of patterning 50 nm dense lines. In addition, microbial bioassays confirmed that the newly developed PAG compounds can be broken down by microorganisms commonly found in conventional wastewater treatment systems. The biodegradation potential of the new PAGs presents a distinct advantage compared to that of PAG perfluorinated structures such as PFOS and perfluorobutane sulfonate, which are highly resistant to biodegradation and difficult to treat by conventional processes. The excellent performance and environmental compatibility of these PAGs make them promising candidates for use in high-resolution lithography systems." @default.
• W2769646273 created "2017-12-04" @default.
• W2769646273 creator A5000512068 @default.
• W2769646273 creator A5029662019 @default.
• W2769646273 creator A5031855893 @default.
• W2769646273 creator A5032407491 @default.
• W2769646273 creator A5048082619 @default.
• W2769646273 creator A5071514312 @default.
• W2769646273 date "2017-12-01" @default.
• W2769646273 modified "2023-10-17" @default.
• W2769646273 title "Lithography performance and environmental compatibility of PFOS-free photoacid generators" @default.
• W2769646273 cites W160467531 @default.
• W2769646273 cites W1964993437 @default.
• W2769646273 cites W1965123282 @default.
• W2769646273 cites W1971778241 @default.
• W2769646273 cites W1976770880 @default.
• W2769646273 cites W1978223505 @default.
• W2769646273 cites W1978847077 @default.
• W2769646273 cites W1980717369 @default.
• W2769646273 cites W1982979715 @default.
• W2769646273 cites W1983070240 @default.
• W2769646273 cites W1986327862 @default.
• W2769646273 cites W1992096081 @default.
• W2769646273 cites W1993464554 @default.
• W2769646273 cites W2007435916 @default.
• W2769646273 cites W2009061059 @default.
• W2769646273 cites W2009809824 @default.
• W2769646273 cites W2016223385 @default.
• W2769646273 cites W2018441363 @default.
• W2769646273 cites W2022339435 @default.
• W2769646273 cites W2034132533 @default.
• W2769646273 cites W2059221690 @default.
• W2769646273 cites W2061378060 @default.
• W2769646273 cites W2071556925 @default.
• W2769646273 cites W2094572345 @default.
• W2769646273 cites W2110720261 @default.
• W2769646273 cites W2115407301 @default.
• W2769646273 cites W2123295237 @default.
• W2769646273 cites W2133412556 @default.
• W2769646273 cites W2145177963 @default.
• W2769646273 cites W2158586865 @default.
• W2769646273 cites W2313706612 @default.
• W2769646273 cites W2482906018 @default.
• W2769646273 cites W2486119844 @default.
• W2769646273 cites W2510758121 @default.
• W2769646273 cites W2064684062 @default.
• W2769646273 doi "https://doi.org/10.1680/jgrma.17.00020" @default.
• W2769646273 hasPublicationYear "2017" @default.
• W2769646273 type Work @default.
• W2769646273 sameAs 2769646273 @default.
• W2769646273 citedByCount "2" @default.
• W2769646273 countsByYear W27696462732019 @default.
• W2769646273 crossrefType "journal-article" @default.
• W2769646273 hasAuthorship W2769646273A5000512068 @default.
• W2769646273 hasAuthorship W2769646273A5029662019 @default.
• W2769646273 hasAuthorship W2769646273A5031855893 @default.
• W2769646273 hasAuthorship W2769646273A5032407491 @default.
• W2769646273 hasAuthorship W2769646273A5048082619 @default.
• W2769646273 hasAuthorship W2769646273A5071514312 @default.
• W2769646273 hasConcept C127413603 @default.
• W2769646273 hasConcept C134406635 @default.
• W2769646273 hasConcept C157021035 @default.
• W2769646273 hasConcept C15920480 @default.
• W2769646273 hasConcept C171250308 @default.
• W2769646273 hasConcept C171534860 @default.
• W2769646273 hasConcept C178790620 @default.
• W2769646273 hasConcept C185592680 @default.
• W2769646273 hasConcept C18903297 @default.
• W2769646273 hasConcept C192562407 @default.
• W2769646273 hasConcept C204223013 @default.
• W2769646273 hasConcept C2777566558 @default.
• W2769646273 hasConcept C2778894819 @default.
• W2769646273 hasConcept C2779227376 @default.
• W2769646273 hasConcept C2781314072 @default.
• W2769646273 hasConcept C42360764 @default.
• W2769646273 hasConcept C49040817 @default.
• W2769646273 hasConcept C521977710 @default.
• W2769646273 hasConcept C537181965 @default.
• W2769646273 hasConcept C86803240 @default.
• W2769646273 hasConceptScore W2769646273C127413603 @default.
• W2769646273 hasConceptScore W2769646273C134406635 @default.
• W2769646273 hasConceptScore W2769646273C157021035 @default.
• W2769646273 hasConceptScore W2769646273C15920480 @default.
• W2769646273 hasConceptScore W2769646273C171250308 @default.
• W2769646273 hasConceptScore W2769646273C171534860 @default.
• W2769646273 hasConceptScore W2769646273C178790620 @default.
• W2769646273 hasConceptScore W2769646273C185592680 @default.
• W2769646273 hasConceptScore W2769646273C18903297 @default.
• W2769646273 hasConceptScore W2769646273C192562407 @default.
• W2769646273 hasConceptScore W2769646273C204223013 @default.
• W2769646273 hasConceptScore W2769646273C2777566558 @default.
• W2769646273 hasConceptScore W2769646273C2778894819 @default.
• W2769646273 hasConceptScore W2769646273C2779227376 @default.
• W2769646273 hasConceptScore W2769646273C2781314072 @default.
• W2769646273 hasConceptScore W2769646273C42360764 @default.
• W2769646273 hasConceptScore W2769646273C49040817 @default.
• W2769646273 hasConceptScore W2769646273C521977710 @default.
• W2769646273 hasConceptScore W2769646273C537181965 @default.

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