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- W2770604297 abstract "A monolithic piezoelectric MEMS-CMOS resonant transformer that can be used in ultra-low-power high-efficiency RF sensing applications is presented for the first time. The MEMS-CMOS resonant transformer is based on a 59 MHz 2-port Aluminum Nitride (AlN) Contour Mode Resonator (CMR) bonded to a 0.18 μm NMOS-based rectifier for voltage boosting and RF-to-DC conversion. The integrated device is fabricated in a foundry-based process by conductive eutectic wafer bonding. To amplify the voltage, the AlN CMR is designed to attain a large quality factor (Q=1150) and a relatively low dielectric capacitance (C <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</inf> =1.51 pF) in relation to the number of rectifier stages (n=20). As a result, a ten-fold voltage gain MEMS-CMOS resonant transformer is demonstrated in this work." @default.
- W2770604297 created "2017-12-04" @default.
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- W2770604297 date "2017-09-01" @default.
- W2770604297 modified "2023-10-11" @default.
- W2770604297 title "Monolithic AlN MEMS-CMOS resonant transformer for wake-up receivers" @default.
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- W2770604297 doi "https://doi.org/10.1109/ultsym.2017.8091647" @default.
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