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• W2772242529 abstract "In this paper, we describe the p–n diode actuators that are driven by the force induced in a depletion layer. It was previously reported that the position of the p–n junction generates the actuation of p–n diode actuators. However, the spread of the depletion layer should also play an important role in p–n diode actuators. We develop a new theory, in which p–n diode actuators are driven by the forces induced by the spread of the depletion layer as well as the position of the p–n junction. For the silicon cantilever-type p–n diode actuator fabricated using an epitaxial substrate, the force generated by the spread of the depletion layer is shown to become dominant. The amplitude of actuators with the depletion layer embedded in a beam is also shown to be proportional to DC bias. These features are very different from those of previously reported actuators. We also present the first actuator that is driven by the depletion layer formed under a root in a beam. Although the amplitude induced under the root of the beam is small, the displacement of the tip of the cantilever is enlarged by resonance. Good agreement of experimental results with the theory is confirmed by evaluating fabricated p–n diode actuators. In addition, the temperature dependence of p–n diode actuators is presented. The measured data show that the temperature coefficient of frequency (TCF) is strongly suppressed by the depletion layer embedded in a beam." @default.
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• W2772242529 date "2017-12-08" @default.
• W2772242529 modified "2023-09-26" @default.
• W2772242529 title "Silicon p–n diode actuators with depletion layer embedded in a beam of cantilever" @default.
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• W2772242529 doi "https://doi.org/10.7567/jjap.57.017201" @default.
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