FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2773687029> ?p ?o ?g. }

• W2773687029 endingPage "628" @default.
• W2773687029 startingPage "622" @default.
• W2773687029 abstract "The compatibility of Au-free (Ti/Al/Ti/TiN) ohmic contacts in the gate-first double-metal (GFDM) process for AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) and Schottky barrier diodes (SBDs) on the same 150-mm wafer was investigated and discussed for the first time, including contact pretreatments, Al diffusion in dielectric layers, and vias (contact windows between two metal layers) etching conditions. All of these steps are crucial to ohmic contacts as well as overall AlGaN/GaN device fabrication process. With the optimized ohmic contacts steps, not only an extremely low ohmic contact resistance (R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> ) value of 1.07 Ω · mm but also an excellent uniformity on the 150-mm wafer was obtained. The performance and uniformity of the MIS-HEMTs and SBDs based on the optimized GFDM process were also discussed." @default.
• W2773687029 created "2017-12-22" @default.
• W2773687029 creator A5005467000 @default.
• W2773687029 creator A5014341625 @default.
• W2773687029 creator A5018814025 @default.
• W2773687029 creator A5024388444 @default.
• W2773687029 creator A5068591019 @default.
• W2773687029 creator A5070108037 @default.
• W2773687029 creator A5073139296 @default.
• W2773687029 date "2018-02-01" @default.
• W2773687029 modified "2023-10-14" @default.
• W2773687029 title "Optimization of Au-Free Ohmic Contact Based on the Gate-First Double-Metal AlGaN/GaN MIS-HEMTs and SBDs Process" @default.
• W2773687029 cites W1536811097 @default.
• W2773687029 cites W1983899757 @default.
• W2773687029 cites W2008925347 @default.
• W2773687029 cites W2020226644 @default.
• W2773687029 cites W2022016471 @default.
• W2773687029 cites W2024931851 @default.
• W2773687029 cites W2033095219 @default.
• W2773687029 cites W2034628705 @default.
• W2773687029 cites W2082022477 @default.
• W2773687029 cites W2084076691 @default.
• W2773687029 cites W2085066220 @default.
• W2773687029 cites W2107276527 @default.
• W2773687029 cites W2116793014 @default.
• W2773687029 cites W2122531807 @default.
• W2773687029 cites W2133603008 @default.
• W2773687029 cites W2141981815 @default.
• W2773687029 cites W2155676710 @default.
• W2773687029 cites W2162809930 @default.
• W2773687029 cites W2215118093 @default.
• W2773687029 cites W2278830795 @default.
• W2773687029 cites W2577136165 @default.
• W2773687029 cites W2587588765 @default.
• W2773687029 cites W2593495332 @default.
• W2773687029 doi "https://doi.org/10.1109/ted.2017.2778072" @default.
• W2773687029 hasPublicationYear "2018" @default.
• W2773687029 type Work @default.
• W2773687029 sameAs 2773687029 @default.
• W2773687029 citedByCount "17" @default.
• W2773687029 countsByYear W27736870292019 @default.
• W2773687029 countsByYear W27736870292020 @default.
• W2773687029 countsByYear W27736870292021 @default.
• W2773687029 countsByYear W27736870292022 @default.
• W2773687029 countsByYear W27736870292023 @default.
• W2773687029 crossrefType "journal-article" @default.
• W2773687029 hasAuthorship W2773687029A5005467000 @default.
• W2773687029 hasAuthorship W2773687029A5014341625 @default.
• W2773687029 hasAuthorship W2773687029A5018814025 @default.
• W2773687029 hasAuthorship W2773687029A5024388444 @default.
• W2773687029 hasAuthorship W2773687029A5068591019 @default.
• W2773687029 hasAuthorship W2773687029A5070108037 @default.
• W2773687029 hasAuthorship W2773687029A5073139296 @default.
• W2773687029 hasConcept C119599485 @default.
• W2773687029 hasConcept C123671423 @default.
• W2773687029 hasConcept C127413603 @default.
• W2773687029 hasConcept C138230450 @default.
• W2773687029 hasConcept C160671074 @default.
• W2773687029 hasConcept C16115445 @default.
• W2773687029 hasConcept C162057924 @default.
• W2773687029 hasConcept C165801399 @default.
• W2773687029 hasConcept C171250308 @default.
• W2773687029 hasConcept C172385210 @default.
• W2773687029 hasConcept C192562407 @default.
• W2773687029 hasConcept C205200001 @default.
• W2773687029 hasConcept C2779227376 @default.
• W2773687029 hasConcept C49040817 @default.
• W2773687029 hasConcept C78434282 @default.
• W2773687029 hasConceptScore W2773687029C119599485 @default.
• W2773687029 hasConceptScore W2773687029C123671423 @default.
• W2773687029 hasConceptScore W2773687029C127413603 @default.
• W2773687029 hasConceptScore W2773687029C138230450 @default.
• W2773687029 hasConceptScore W2773687029C160671074 @default.
• W2773687029 hasConceptScore W2773687029C16115445 @default.
• W2773687029 hasConceptScore W2773687029C162057924 @default.
• W2773687029 hasConceptScore W2773687029C165801399 @default.
• W2773687029 hasConceptScore W2773687029C171250308 @default.
• W2773687029 hasConceptScore W2773687029C172385210 @default.
• W2773687029 hasConceptScore W2773687029C192562407 @default.
• W2773687029 hasConceptScore W2773687029C205200001 @default.
• W2773687029 hasConceptScore W2773687029C2779227376 @default.
• W2773687029 hasConceptScore W2773687029C49040817 @default.
• W2773687029 hasConceptScore W2773687029C78434282 @default.
• W2773687029 hasFunder F4320321001 @default.
• W2773687029 hasFunder F4320324787 @default.
• W2773687029 hasIssue "2" @default.
• W2773687029 hasLocation W27736870291 @default.
• W2773687029 hasOpenAccess W2773687029 @default.
• W2773687029 hasPrimaryLocation W27736870291 @default.
• W2773687029 hasRelatedWork W1989398976 @default.
• W2773687029 hasRelatedWork W1990507445 @default.
• W2773687029 hasRelatedWork W2027845206 @default.
• W2773687029 hasRelatedWork W2065628029 @default.
• W2773687029 hasRelatedWork W2126595632 @default.
• W2773687029 hasRelatedWork W2243194799 @default.
• W2773687029 hasRelatedWork W2326582722 @default.
• W2773687029 hasRelatedWork W2342626181 @default.
• W2773687029 hasRelatedWork W3144526293 @default.

• next