Matches in SemOpenAlex for { <https://semopenalex.org/work/W2775005989> ?p ?o ?g. }
- W2775005989 abstract "Laser heat-mode lithography is a very useful method for high-speed fabrication of large-area micro/nanostructures. To obtain nanoscale pattern structures, one needs to manipulate the thermal diffusion channels. This work reports the manipulation of the thermal diffusion in laser heat-mode lithography and provides methods to restrain the in-plane thermal diffusion and improve the out-of-plane thermal diffusion. The thermal field profiles in heat-mode resist thin films have been given. It is found that the size of the heat-spot can be decreased by decreasing the thickness of the heat-mode resist thin films, inserting the thermal conduction layers, and shortening the laser irradiation time. The optimized laser writing strategy is also given, where the in-plane thermal diffusion is completely restrained and the out-of-plane thermal diffusion is improved. The heat-spot size is almost equal to that of the laser spot, accordingly. This work provides a very important guide to laser heat-mode lithography." @default.
- W2775005989 created "2017-12-22" @default.
- W2775005989 creator A5011460262 @default.
- W2775005989 creator A5044340236 @default.
- W2775005989 creator A5077254770 @default.
- W2775005989 creator A5089148041 @default.
- W2775005989 date "2017-12-12" @default.
- W2775005989 modified "2023-10-16" @default.
- W2775005989 title "Manipulation and simulations of thermal field profiles in laser heat-mode lithography" @default.
- W2775005989 cites W1501261314 @default.
- W2775005989 cites W1968280295 @default.
- W2775005989 cites W1977387790 @default.
- W2775005989 cites W2007377848 @default.
- W2775005989 cites W2009568898 @default.
- W2775005989 cites W2013740428 @default.
- W2775005989 cites W2022151017 @default.
- W2775005989 cites W2027611941 @default.
- W2775005989 cites W2036632874 @default.
- W2775005989 cites W2037075426 @default.
- W2775005989 cites W2037462533 @default.
- W2775005989 cites W2040045500 @default.
- W2775005989 cites W2055340724 @default.
- W2775005989 cites W2058034748 @default.
- W2775005989 cites W2058737995 @default.
- W2775005989 cites W2059106632 @default.
- W2775005989 cites W2059445056 @default.
- W2775005989 cites W2065723378 @default.
- W2775005989 cites W2075977180 @default.
- W2775005989 cites W2077735967 @default.
- W2775005989 cites W2079438058 @default.
- W2775005989 cites W2079529844 @default.
- W2775005989 cites W2085280700 @default.
- W2775005989 cites W2085925993 @default.
- W2775005989 cites W2094656325 @default.
- W2775005989 cites W2100812752 @default.
- W2775005989 cites W2119616617 @default.
- W2775005989 cites W2120129902 @default.
- W2775005989 cites W2136844372 @default.
- W2775005989 cites W2164598813 @default.
- W2775005989 cites W2168793632 @default.
- W2775005989 cites W2223488543 @default.
- W2775005989 cites W2223810291 @default.
- W2775005989 cites W2318320860 @default.
- W2775005989 cites W2321868400 @default.
- W2775005989 cites W2346105761 @default.
- W2775005989 cites W2347201303 @default.
- W2775005989 cites W2463959360 @default.
- W2775005989 cites W2482906018 @default.
- W2775005989 cites W2566161690 @default.
- W2775005989 cites W2594362226 @default.
- W2775005989 cites W2610776741 @default.
- W2775005989 cites W2622672966 @default.
- W2775005989 cites W2624302959 @default.
- W2775005989 cites W2975639389 @default.
- W2775005989 cites W3099414037 @default.
- W2775005989 cites W2040984679 @default.
- W2775005989 cites W2076059605 @default.
- W2775005989 cites W2344461808 @default.
- W2775005989 doi "https://doi.org/10.1063/1.5002575" @default.
- W2775005989 hasPublicationYear "2017" @default.
- W2775005989 type Work @default.
- W2775005989 sameAs 2775005989 @default.
- W2775005989 citedByCount "6" @default.
- W2775005989 countsByYear W27750059892019 @default.
- W2775005989 countsByYear W27750059892020 @default.
- W2775005989 countsByYear W27750059892023 @default.
- W2775005989 crossrefType "journal-article" @default.
- W2775005989 hasAuthorship W2775005989A5011460262 @default.
- W2775005989 hasAuthorship W2775005989A5044340236 @default.
- W2775005989 hasAuthorship W2775005989A5077254770 @default.
- W2775005989 hasAuthorship W2775005989A5089148041 @default.
- W2775005989 hasConcept C120665830 @default.
- W2775005989 hasConcept C121332964 @default.
- W2775005989 hasConcept C137905882 @default.
- W2775005989 hasConcept C159985019 @default.
- W2775005989 hasConcept C171250308 @default.
- W2775005989 hasConcept C172100665 @default.
- W2775005989 hasConcept C192562407 @default.
- W2775005989 hasConcept C200274948 @default.
- W2775005989 hasConcept C204223013 @default.
- W2775005989 hasConcept C204530211 @default.
- W2775005989 hasConcept C2779227376 @default.
- W2775005989 hasConcept C37668627 @default.
- W2775005989 hasConcept C41794268 @default.
- W2775005989 hasConcept C49040817 @default.
- W2775005989 hasConcept C520434653 @default.
- W2775005989 hasConcept C53524968 @default.
- W2775005989 hasConcept C97355855 @default.
- W2775005989 hasConceptScore W2775005989C120665830 @default.
- W2775005989 hasConceptScore W2775005989C121332964 @default.
- W2775005989 hasConceptScore W2775005989C137905882 @default.
- W2775005989 hasConceptScore W2775005989C159985019 @default.
- W2775005989 hasConceptScore W2775005989C171250308 @default.
- W2775005989 hasConceptScore W2775005989C172100665 @default.
- W2775005989 hasConceptScore W2775005989C192562407 @default.
- W2775005989 hasConceptScore W2775005989C200274948 @default.
- W2775005989 hasConceptScore W2775005989C204223013 @default.
- W2775005989 hasConceptScore W2775005989C204530211 @default.
- W2775005989 hasConceptScore W2775005989C2779227376 @default.
- W2775005989 hasConceptScore W2775005989C37668627 @default.