Matches in SemOpenAlex for { <https://semopenalex.org/work/W2775156920> ?p ?o ?g. }
- W2775156920 endingPage "05LT01" @default.
- W2775156920 startingPage "05LT01" @default.
- W2775156920 abstract "The nitride layer formed in the target race track during the deposition of stoichiometric TiN thin films is a factor 2.5 thicker for high power impulse magnetron sputtering (HIPIMS), compared to conventional dc processing (DCMS). The phenomenon is explained using x-ray photoelectron spectroscopy analysis of the as-operated Ti target surface chemistry supported by sputter depth profiles, dynamic Monte Carlo simulations employing the TRIDYN code, and plasma chemical investigations by ion mass spectrometry. The target chemistry and the thickness of the nitride layer are found to be determined by the implantation of nitrogen ions, predominantly N+ and for HIPIMS and DCMS, respectively. Knowledge of this method-inherent difference enables robust processing of high quality functional coatings." @default.
- W2775156920 created "2017-12-22" @default.
- W2775156920 creator A5008411200 @default.
- W2775156920 creator A5009516679 @default.
- W2775156920 creator A5022663478 @default.
- W2775156920 creator A5048978284 @default.
- W2775156920 date "2018-01-12" @default.
- W2775156920 modified "2023-10-09" @default.
- W2775156920 title "Substantial difference in target surface chemistry between reactive dc and high power impulse magnetron sputtering" @default.
- W2775156920 cites W1499121024 @default.
- W2775156920 cites W1966782256 @default.
- W2775156920 cites W1967134773 @default.
- W2775156920 cites W1967248904 @default.
- W2775156920 cites W1976882386 @default.
- W2775156920 cites W1983365479 @default.
- W2775156920 cites W1983406786 @default.
- W2775156920 cites W1984672398 @default.
- W2775156920 cites W1987326471 @default.
- W2775156920 cites W1989584263 @default.
- W2775156920 cites W1992129382 @default.
- W2775156920 cites W2000812422 @default.
- W2775156920 cites W2003262087 @default.
- W2775156920 cites W2008744161 @default.
- W2775156920 cites W2011487805 @default.
- W2775156920 cites W2033098126 @default.
- W2775156920 cites W2034433960 @default.
- W2775156920 cites W2040870129 @default.
- W2775156920 cites W2051944828 @default.
- W2775156920 cites W2052784219 @default.
- W2775156920 cites W2053667303 @default.
- W2775156920 cites W2057965248 @default.
- W2775156920 cites W2064545440 @default.
- W2775156920 cites W2070316099 @default.
- W2775156920 cites W2077823192 @default.
- W2775156920 cites W2079567509 @default.
- W2775156920 cites W2083590781 @default.
- W2775156920 cites W2084101536 @default.
- W2775156920 cites W2086710447 @default.
- W2775156920 cites W2152008325 @default.
- W2775156920 cites W2167386044 @default.
- W2775156920 cites W2344431215 @default.
- W2775156920 cites W2473773761 @default.
- W2775156920 cites W2519906834 @default.
- W2775156920 cites W2533482753 @default.
- W2775156920 cites W2538671810 @default.
- W2775156920 cites W2568262298 @default.
- W2775156920 cites W2585549855 @default.
- W2775156920 cites W2586457035 @default.
- W2775156920 cites W2592941099 @default.
- W2775156920 cites W2734406264 @default.
- W2775156920 cites W4244110490 @default.
- W2775156920 doi "https://doi.org/10.1088/1361-6463/aaa0ee" @default.
- W2775156920 hasPublicationYear "2018" @default.
- W2775156920 type Work @default.
- W2775156920 sameAs 2775156920 @default.
- W2775156920 citedByCount "10" @default.
- W2775156920 countsByYear W27751569202018 @default.
- W2775156920 countsByYear W27751569202019 @default.
- W2775156920 countsByYear W27751569202020 @default.
- W2775156920 countsByYear W27751569202021 @default.
- W2775156920 countsByYear W27751569202022 @default.
- W2775156920 countsByYear W27751569202023 @default.
- W2775156920 crossrefType "journal-article" @default.
- W2775156920 hasAuthorship W2775156920A5008411200 @default.
- W2775156920 hasAuthorship W2775156920A5009516679 @default.
- W2775156920 hasAuthorship W2775156920A5022663478 @default.
- W2775156920 hasAuthorship W2775156920A5048978284 @default.
- W2775156920 hasBestOaLocation W27751569201 @default.
- W2775156920 hasConcept C113196181 @default.
- W2775156920 hasConcept C123408415 @default.
- W2775156920 hasConcept C127413603 @default.
- W2775156920 hasConcept C145148216 @default.
- W2775156920 hasConcept C171250308 @default.
- W2775156920 hasConcept C175708663 @default.
- W2775156920 hasConcept C178790620 @default.
- W2775156920 hasConcept C185592680 @default.
- W2775156920 hasConcept C19067145 @default.
- W2775156920 hasConcept C191897082 @default.
- W2775156920 hasConcept C192562407 @default.
- W2775156920 hasConcept C194760766 @default.
- W2775156920 hasConcept C22423302 @default.
- W2775156920 hasConcept C2779227376 @default.
- W2775156920 hasConcept C42360764 @default.
- W2775156920 hasConcept C43617362 @default.
- W2775156920 hasConcept C49040817 @default.
- W2775156920 hasConcept C525849907 @default.
- W2775156920 hasConcept C61427134 @default.
- W2775156920 hasConcept C97892325 @default.
- W2775156920 hasConceptScore W2775156920C113196181 @default.
- W2775156920 hasConceptScore W2775156920C123408415 @default.
- W2775156920 hasConceptScore W2775156920C127413603 @default.
- W2775156920 hasConceptScore W2775156920C145148216 @default.
- W2775156920 hasConceptScore W2775156920C171250308 @default.
- W2775156920 hasConceptScore W2775156920C175708663 @default.
- W2775156920 hasConceptScore W2775156920C178790620 @default.
- W2775156920 hasConceptScore W2775156920C185592680 @default.
- W2775156920 hasConceptScore W2775156920C19067145 @default.
- W2775156920 hasConceptScore W2775156920C191897082 @default.