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• W2775432868 abstract "A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typical theoretical models (Rayleigh-Ritz model, Euler-Bernoulli (E-B) beam model and spring mass model), the proposed theoretical model can obtain Young’s modulus of multi-layer microcantilevers more precisely. Also, the influences of coating’s geometric dimensions on Young’s modulus and resonant frequency of microcantilevers are discussed. The thickness of coating has a great influence on Young’s modulus and resonant frequency of multi-layer microcantilevers, and the coating should be considered to calculate Young’s modulus more precisely, especially when fairly thicker coating is employed." @default.
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• W2775432868 date "2017-12-01" @default.
• W2775432868 modified "2023-10-11" @default.
• W2775432868 title "Young’s modulus of multi-layer microcantilevers" @default.
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• W2775432868 doi "https://doi.org/10.1063/1.5011212" @default.
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