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- W2777886787 abstract "Both helium and gallium ion beams were employed to fabricate nanopores. Herein, three-dimensional nano-volcano-shaped nanopores (3D-NVNs) were directly formed using helium ion beam with no precursors required, while the gallium ion beam produced V-shaped nanopores. Hundreds of 3D-NVNs were fabricated with a mean diameter of 229 ± 7 nm, where the He ion beam milling rate for the 3D-NVNs was 3.6 ± 0.2 μm3/μC. The height of the 3D-NVNs was greater than their depth when the dose range was 0–10 nC/μm2, while the height remained constant for doses above 10 nC/μm2. Trajectory simulations of the ion bombardment into the gold film clarified that ion implantation could primarily account for the volcano-shaped nanopore formation." @default.
- W2777886787 created "2018-01-05" @default.
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- W2777886787 date "2017-12-29" @default.
- W2777886787 modified "2023-10-14" @default.
- W2777886787 title "Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy" @default.
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- W2777886787 doi "https://doi.org/10.1116/1.5001927" @default.
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