Matches in SemOpenAlex for { <https://semopenalex.org/work/W2778348535> ?p ?o ?g. }
Showing items 1 to 57 of
57
with 100 items per page.
- W2778348535 abstract "Author(s): Mirkarimi, P.B.; Spiller, E.; Baker, S.L.; Robinson, J.C.; Salmassi, F.; Park, S.-J.; Liang, T.; Stivers, A.R.; Ultanir, E." @default.
- W2778348535 created "2018-01-05" @default.
- W2778348535 creator A5009897341 @default.
- W2778348535 creator A5020238972 @default.
- W2778348535 creator A5020632318 @default.
- W2778348535 creator A5041221513 @default.
- W2778348535 creator A5060023226 @default.
- W2778348535 creator A5060116806 @default.
- W2778348535 creator A5068036333 @default.
- W2778348535 creator A5071071752 @default.
- W2778348535 creator A5088810494 @default.
- W2778348535 date "2006-06-25" @default.
- W2778348535 modified "2023-10-15" @default.
- W2778348535 title "Smoothing EUVL mask substrate defects with an emphasis on real-world pits" @default.
- W2778348535 hasPublicationYear "2006" @default.
- W2778348535 type Work @default.
- W2778348535 sameAs 2778348535 @default.
- W2778348535 citedByCount "0" @default.
- W2778348535 crossrefType "journal-article" @default.
- W2778348535 hasAuthorship W2778348535A5009897341 @default.
- W2778348535 hasAuthorship W2778348535A5020238972 @default.
- W2778348535 hasAuthorship W2778348535A5020632318 @default.
- W2778348535 hasAuthorship W2778348535A5041221513 @default.
- W2778348535 hasAuthorship W2778348535A5060023226 @default.
- W2778348535 hasAuthorship W2778348535A5060116806 @default.
- W2778348535 hasAuthorship W2778348535A5068036333 @default.
- W2778348535 hasAuthorship W2778348535A5071071752 @default.
- W2778348535 hasAuthorship W2778348535A5088810494 @default.
- W2778348535 hasConcept C111368507 @default.
- W2778348535 hasConcept C127313418 @default.
- W2778348535 hasConcept C162996421 @default.
- W2778348535 hasConcept C171250308 @default.
- W2778348535 hasConcept C177454536 @default.
- W2778348535 hasConcept C192562407 @default.
- W2778348535 hasConcept C2777289219 @default.
- W2778348535 hasConcept C31972630 @default.
- W2778348535 hasConcept C3770464 @default.
- W2778348535 hasConcept C41008148 @default.
- W2778348535 hasConcept C76155785 @default.
- W2778348535 hasConceptScore W2778348535C111368507 @default.
- W2778348535 hasConceptScore W2778348535C127313418 @default.
- W2778348535 hasConceptScore W2778348535C162996421 @default.
- W2778348535 hasConceptScore W2778348535C171250308 @default.
- W2778348535 hasConceptScore W2778348535C177454536 @default.
- W2778348535 hasConceptScore W2778348535C192562407 @default.
- W2778348535 hasConceptScore W2778348535C2777289219 @default.
- W2778348535 hasConceptScore W2778348535C31972630 @default.
- W2778348535 hasConceptScore W2778348535C3770464 @default.
- W2778348535 hasConceptScore W2778348535C41008148 @default.
- W2778348535 hasConceptScore W2778348535C76155785 @default.
- W2778348535 hasLocation W27783485351 @default.
- W2778348535 hasOpenAccess W2778348535 @default.
- W2778348535 hasPrimaryLocation W27783485351 @default.
- W2778348535 isParatext "false" @default.
- W2778348535 isRetracted "false" @default.
- W2778348535 magId "2778348535" @default.
- W2778348535 workType "article" @default.