Matches in SemOpenAlex for { <https://semopenalex.org/work/W2783103475> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2783103475 abstract "In this study, an area‐selective metal‐organic vapor‐phase epitaxy (MOVPE) for trench‐confined InP‐based epitaxial regrowth in‐between arrayed rectangular‐shaped device elements is reported. Test structures are fabricated to investigate the influence of MOVPE growth and other processing parameters on regrowth control, doping incorporation, and morphology. For correctly chosen crystallographic mesa orientation and mask geometry, good control of growth selectivity, layer morphology, and doping concentration can be achieved, although with an enhanced and non‐constant growth rate. This is discussed in terms of orientation‐dependent growth rate and loading effects. In addition, a selective etch and regrowth approach which allows for the processing of field‐effect transistors of significance for spatial light modulators with trench‐integrated driver electronics is successfully implemented." @default.
- W2783103475 created "2018-01-26" @default.
- W2783103475 creator A5004745262 @default.
- W2783103475 creator A5007617081 @default.
- W2783103475 creator A5007792663 @default.
- W2783103475 creator A5051418616 @default.
- W2783103475 creator A5065243448 @default.
- W2783103475 creator A5090832599 @default.
- W2783103475 date "2018-01-10" @default.
- W2783103475 modified "2023-10-16" @default.
- W2783103475 title "Trench-Confined InP-Based Epitaxial Regrowth Using Metal-Organic Vapor-Phase Epitaxy" @default.
- W2783103475 cites W2007685398 @default.
- W2783103475 cites W2027167691 @default.
- W2783103475 cites W2041096796 @default.
- W2783103475 cites W2051664456 @default.
- W2783103475 cites W2088759542 @default.
- W2783103475 cites W2104002808 @default.
- W2783103475 cites W2113493487 @default.
- W2783103475 cites W2157462170 @default.
- W2783103475 cites W2166479559 @default.
- W2783103475 doi "https://doi.org/10.1002/pssa.201700454" @default.
- W2783103475 hasPublicationYear "2018" @default.
- W2783103475 type Work @default.
- W2783103475 sameAs 2783103475 @default.
- W2783103475 citedByCount "0" @default.
- W2783103475 crossrefType "journal-article" @default.
- W2783103475 hasAuthorship W2783103475A5004745262 @default.
- W2783103475 hasAuthorship W2783103475A5007617081 @default.
- W2783103475 hasAuthorship W2783103475A5007792663 @default.
- W2783103475 hasAuthorship W2783103475A5051418616 @default.
- W2783103475 hasAuthorship W2783103475A5065243448 @default.
- W2783103475 hasAuthorship W2783103475A5090832599 @default.
- W2783103475 hasConcept C110738630 @default.
- W2783103475 hasConcept C155310634 @default.
- W2783103475 hasConcept C171250308 @default.
- W2783103475 hasConcept C175665537 @default.
- W2783103475 hasConcept C178790620 @default.
- W2783103475 hasConcept C185592680 @default.
- W2783103475 hasConcept C191897082 @default.
- W2783103475 hasConcept C192562407 @default.
- W2783103475 hasConcept C2779227376 @default.
- W2783103475 hasConcept C44280652 @default.
- W2783103475 hasConcept C49040817 @default.
- W2783103475 hasConcept C544153396 @default.
- W2783103475 hasConcept C57863236 @default.
- W2783103475 hasConceptScore W2783103475C110738630 @default.
- W2783103475 hasConceptScore W2783103475C155310634 @default.
- W2783103475 hasConceptScore W2783103475C171250308 @default.
- W2783103475 hasConceptScore W2783103475C175665537 @default.
- W2783103475 hasConceptScore W2783103475C178790620 @default.
- W2783103475 hasConceptScore W2783103475C185592680 @default.
- W2783103475 hasConceptScore W2783103475C191897082 @default.
- W2783103475 hasConceptScore W2783103475C192562407 @default.
- W2783103475 hasConceptScore W2783103475C2779227376 @default.
- W2783103475 hasConceptScore W2783103475C44280652 @default.
- W2783103475 hasConceptScore W2783103475C49040817 @default.
- W2783103475 hasConceptScore W2783103475C544153396 @default.
- W2783103475 hasConceptScore W2783103475C57863236 @default.
- W2783103475 hasIssue "8" @default.
- W2783103475 hasLocation W27831034751 @default.
- W2783103475 hasOpenAccess W2783103475 @default.
- W2783103475 hasPrimaryLocation W27831034751 @default.
- W2783103475 hasRelatedWork W1504272055 @default.
- W2783103475 hasRelatedWork W1991248429 @default.
- W2783103475 hasRelatedWork W2002571244 @default.
- W2783103475 hasRelatedWork W2294544677 @default.
- W2783103475 hasRelatedWork W2352983419 @default.
- W2783103475 hasRelatedWork W2499625984 @default.
- W2783103475 hasRelatedWork W2528321637 @default.
- W2783103475 hasRelatedWork W2743194952 @default.
- W2783103475 hasRelatedWork W2946249126 @default.
- W2783103475 hasRelatedWork W3144352949 @default.
- W2783103475 hasVolume "215" @default.
- W2783103475 isParatext "false" @default.
- W2783103475 isRetracted "false" @default.
- W2783103475 magId "2783103475" @default.
- W2783103475 workType "article" @default.