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• W2783107811 abstract "We propose the creation of a new set of fab simulation testbeds. Extensions and additional features, not considered in the original MIMAC datasets, shall be incorporated in these new testbeds, thus allowing researchers to evaluate new methodologies with the same frame of reference. To do this, we surveyed the literature and mapped the pertinent research efforts of the past two decades. In this paper, we discuss in detail the various aspects of the new testbeds, in order to receive feedback from the simulation community on the importance of inclusion of some of the items in question; and the verification of the required inclusion of other items. Given the feedback, we aim to generate these testbeds within a year to serve as the new frame of reference for the benefit of the entire semiconductor manufacturing simulation community." @default.
• W2783107811 created "2018-01-26" @default.
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• W2783107811 date "2017-12-03" @default.
• W2783107811 modified "2023-09-26" @default.
• W2783107811 title "Towards a new simulation testbed for semiconductor manufacturing" @default.
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• W2783107811 doi "https://doi.org/10.5555/3242181.3242495" @default.
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