Matches in SemOpenAlex for { <https://semopenalex.org/work/W2783122312> ?p ?o ?g. }
- W2783122312 endingPage "1" @default.
- W2783122312 startingPage "1" @default.
- W2783122312 abstract "Low resistance is an important requirement for microcoils which act as a signal receiver to ensure low thermal noise during signal detection. High-aspect ratio (HAR) planar microcoils entrenched in blind silicon trenches have features that make them more attractive than their traditional counterparts employing electroplating through a patterned thick polymer or achieved through silicon vias. However, challenges met in fabrication of such coils have not been discussed in detail until now. This paper reports the realization of such HAR microcoils embedded in Si blind trenches, fabricated with a single lithography step by first etching blind trenches in the silicon substrate with an aspect ratio of almost 3∶1 and then filling them up using copper electroplating. The electroplating was followed by chemical wet etching as a faster way of removing excess copper than traditional chemical mechanical polishing. Electrical resistance was further reduced by annealing the microcoils. The process steps and challenges faced in the realization of such structures are reported here followed by their electrical characterization. The obtained electrical resistances are then compared with those of other similar microcoils embedded in blind vias." @default.
- W2783122312 created "2018-01-26" @default.
- W2783122312 creator A5028156980 @default.
- W2783122312 creator A5037657157 @default.
- W2783122312 creator A5057101423 @default.
- W2783122312 date "2018-01-09" @default.
- W2783122312 modified "2023-09-26" @default.
- W2783122312 title "Fabrication of silicon-embedded low resistance high-aspect ratio planar copper microcoils" @default.
- W2783122312 cites W1541015771 @default.
- W2783122312 cites W1975278363 @default.
- W2783122312 cites W1978391578 @default.
- W2783122312 cites W1995877862 @default.
- W2783122312 cites W1996842139 @default.
- W2783122312 cites W2016180229 @default.
- W2783122312 cites W2017315972 @default.
- W2783122312 cites W2018034176 @default.
- W2783122312 cites W2020129969 @default.
- W2783122312 cites W2026635780 @default.
- W2783122312 cites W2031695596 @default.
- W2783122312 cites W2032294530 @default.
- W2783122312 cites W2035930650 @default.
- W2783122312 cites W2038595430 @default.
- W2783122312 cites W2043272907 @default.
- W2783122312 cites W2045518789 @default.
- W2783122312 cites W2048042430 @default.
- W2783122312 cites W2051116798 @default.
- W2783122312 cites W2052019448 @default.
- W2783122312 cites W2056188075 @default.
- W2783122312 cites W2057825731 @default.
- W2783122312 cites W2060841971 @default.
- W2783122312 cites W2078821465 @default.
- W2783122312 cites W2080264318 @default.
- W2783122312 cites W2086742151 @default.
- W2783122312 cites W2095179513 @default.
- W2783122312 cites W2097941400 @default.
- W2783122312 cites W2102868442 @default.
- W2783122312 cites W2104793872 @default.
- W2783122312 cites W2110867625 @default.
- W2783122312 cites W2113238227 @default.
- W2783122312 cites W2116371264 @default.
- W2783122312 cites W2119346729 @default.
- W2783122312 cites W2125377543 @default.
- W2783122312 cites W2144706784 @default.
- W2783122312 cites W2145953885 @default.
- W2783122312 cites W2148047620 @default.
- W2783122312 cites W2149313904 @default.
- W2783122312 cites W2159744384 @default.
- W2783122312 cites W2161333300 @default.
- W2783122312 cites W2166999056 @default.
- W2783122312 cites W2171571817 @default.
- W2783122312 cites W2272764334 @default.
- W2783122312 cites W2338061999 @default.
- W2783122312 cites W2544834214 @default.
- W2783122312 cites W2563477651 @default.
- W2783122312 cites W2589082518 @default.
- W2783122312 cites W78320935 @default.
- W2783122312 doi "https://doi.org/10.1117/1.jmm.17.1.014501" @default.
- W2783122312 hasPublicationYear "2018" @default.
- W2783122312 type Work @default.
- W2783122312 sameAs 2783122312 @default.
- W2783122312 citedByCount "0" @default.
- W2783122312 crossrefType "journal-article" @default.
- W2783122312 hasAuthorship W2783122312A5028156980 @default.
- W2783122312 hasAuthorship W2783122312A5037657157 @default.
- W2783122312 hasAuthorship W2783122312A5057101423 @default.
- W2783122312 hasBestOaLocation W27831223122 @default.
- W2783122312 hasConcept C100460472 @default.
- W2783122312 hasConcept C121684516 @default.
- W2783122312 hasConcept C130472188 @default.
- W2783122312 hasConcept C134786449 @default.
- W2783122312 hasConcept C136525101 @default.
- W2783122312 hasConcept C138113353 @default.
- W2783122312 hasConcept C142724271 @default.
- W2783122312 hasConcept C159985019 @default.
- W2783122312 hasConcept C160671074 @default.
- W2783122312 hasConcept C171250308 @default.
- W2783122312 hasConcept C180088628 @default.
- W2783122312 hasConcept C191897082 @default.
- W2783122312 hasConcept C192562407 @default.
- W2783122312 hasConcept C204223013 @default.
- W2783122312 hasConcept C204787440 @default.
- W2783122312 hasConcept C2779227376 @default.
- W2783122312 hasConcept C33220542 @default.
- W2783122312 hasConcept C41008148 @default.
- W2783122312 hasConcept C49040817 @default.
- W2783122312 hasConcept C51807945 @default.
- W2783122312 hasConcept C53524968 @default.
- W2783122312 hasConcept C544778455 @default.
- W2783122312 hasConcept C544956773 @default.
- W2783122312 hasConcept C71924100 @default.
- W2783122312 hasConceptScore W2783122312C100460472 @default.
- W2783122312 hasConceptScore W2783122312C121684516 @default.
- W2783122312 hasConceptScore W2783122312C130472188 @default.
- W2783122312 hasConceptScore W2783122312C134786449 @default.
- W2783122312 hasConceptScore W2783122312C136525101 @default.
- W2783122312 hasConceptScore W2783122312C138113353 @default.
- W2783122312 hasConceptScore W2783122312C142724271 @default.
- W2783122312 hasConceptScore W2783122312C159985019 @default.