Matches in SemOpenAlex for { <https://semopenalex.org/work/W2783126416> ?p ?o ?g. }
- W2783126416 endingPage "123" @default.
- W2783126416 startingPage "115" @default.
- W2783126416 abstract "Abstract Silicon incorporated C N films were prepared by ion beam assisted magnetron sputtering using silicon/graphite composite target. The microstructure of the Si C N films was characterized by SEM, XPS, TEM and Raman spectroscopy. Mechanical and lubricated tribological behavior of the films were investigated by the nano-indentation experiments and ball-on-disc tribotest in Hank's solution. With the increase of silicon target fraction (FT-Si), the silicon content steadily increased from 1.8 to 15.8 at.% with a simultaneous decrease in the C content from 78 at.% to 56 at.%. The N content slightly decreased from 25.2 at.% to 19.8 at.%, and silicon and N content is saturated as the FT-Si reaches about 50 at.%. The hardness and elastic modulus increased with the FT-Si, while the average friction coefficient decreased with the FT-Si increase. The C N films deposited at a FT-Si of 10 vol% show the lowest coefficient of friction of 0.049, and exhibited good mechanical and lubricated tribological properties." @default.
- W2783126416 created "2018-01-26" @default.
- W2783126416 creator A5000234334 @default.
- W2783126416 creator A5001425577 @default.
- W2783126416 creator A5005707642 @default.
- W2783126416 creator A5022469136 @default.
- W2783126416 creator A5039996446 @default.
- W2783126416 date "2018-02-01" @default.
- W2783126416 modified "2023-09-25" @default.
- W2783126416 title "Structure and lubricated tribological behavior of silicon incorporated carbon nitride composite films deposited by magnetron sputtering" @default.
- W2783126416 cites W1181840560 @default.
- W2783126416 cites W1569652549 @default.
- W2783126416 cites W1704037417 @default.
- W2783126416 cites W1969399127 @default.
- W2783126416 cites W1970585737 @default.
- W2783126416 cites W1978908086 @default.
- W2783126416 cites W1979125743 @default.
- W2783126416 cites W1981131874 @default.
- W2783126416 cites W1986510298 @default.
- W2783126416 cites W1986669188 @default.
- W2783126416 cites W1986824746 @default.
- W2783126416 cites W1987858828 @default.
- W2783126416 cites W1988822899 @default.
- W2783126416 cites W1993032789 @default.
- W2783126416 cites W1995115638 @default.
- W2783126416 cites W1999400349 @default.
- W2783126416 cites W2000015515 @default.
- W2783126416 cites W2007890666 @default.
- W2783126416 cites W2011042519 @default.
- W2783126416 cites W2013400671 @default.
- W2783126416 cites W2015431082 @default.
- W2783126416 cites W2015550378 @default.
- W2783126416 cites W2018790967 @default.
- W2783126416 cites W2019332146 @default.
- W2783126416 cites W2021664045 @default.
- W2783126416 cites W2022896717 @default.
- W2783126416 cites W2023862683 @default.
- W2783126416 cites W2027164067 @default.
- W2783126416 cites W2027680240 @default.
- W2783126416 cites W2029682050 @default.
- W2783126416 cites W2034325704 @default.
- W2783126416 cites W2035504831 @default.
- W2783126416 cites W2035993889 @default.
- W2783126416 cites W2036691788 @default.
- W2783126416 cites W2037142486 @default.
- W2783126416 cites W2042160252 @default.
- W2783126416 cites W2044094071 @default.
- W2783126416 cites W2045171985 @default.
- W2783126416 cites W2046539665 @default.
- W2783126416 cites W2046715744 @default.
- W2783126416 cites W2057622712 @default.
- W2783126416 cites W2059354439 @default.
- W2783126416 cites W2061622962 @default.
- W2783126416 cites W2061991606 @default.
- W2783126416 cites W2063758531 @default.
- W2783126416 cites W2064165150 @default.
- W2783126416 cites W2066725997 @default.
- W2783126416 cites W2069670241 @default.
- W2783126416 cites W2070081591 @default.
- W2783126416 cites W2070959306 @default.
- W2783126416 cites W2072837525 @default.
- W2783126416 cites W2085604199 @default.
- W2783126416 cites W2090145835 @default.
- W2783126416 cites W2101870738 @default.
- W2783126416 cites W2127527825 @default.
- W2783126416 cites W2279421375 @default.
- W2783126416 cites W2309839528 @default.
- W2783126416 cites W2333760053 @default.
- W2783126416 cites W2414657148 @default.
- W2783126416 cites W2531735263 @default.
- W2783126416 cites W2581002736 @default.
- W2783126416 cites W2587512186 @default.
- W2783126416 cites W2603846466 @default.
- W2783126416 cites W2606297820 @default.
- W2783126416 cites W2750580223 @default.
- W2783126416 cites W793506607 @default.
- W2783126416 doi "https://doi.org/10.1016/j.diamond.2018.01.008" @default.
- W2783126416 hasPublicationYear "2018" @default.
- W2783126416 type Work @default.
- W2783126416 sameAs 2783126416 @default.
- W2783126416 citedByCount "7" @default.
- W2783126416 countsByYear W27831264162020 @default.
- W2783126416 countsByYear W27831264162021 @default.
- W2783126416 countsByYear W27831264162022 @default.
- W2783126416 crossrefType "journal-article" @default.
- W2783126416 hasAuthorship W2783126416A5000234334 @default.
- W2783126416 hasAuthorship W2783126416A5001425577 @default.
- W2783126416 hasAuthorship W2783126416A5005707642 @default.
- W2783126416 hasAuthorship W2783126416A5022469136 @default.
- W2783126416 hasAuthorship W2783126416A5039996446 @default.
- W2783126416 hasConcept C104779481 @default.
- W2783126416 hasConcept C123408415 @default.
- W2783126416 hasConcept C140205800 @default.
- W2783126416 hasConcept C159985019 @default.
- W2783126416 hasConcept C161790260 @default.
- W2783126416 hasConcept C167310744 @default.
- W2783126416 hasConcept C171250308 @default.
- W2783126416 hasConcept C185592680 @default.