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- W2783127230 endingPage "58" @default.
- W2783127230 startingPage "48" @default.
- W2783127230 abstract "The determination of atomic structures and further quantitative information such as chemical compositions at atomic scale for semiconductor defects or heteroepitaxial interfaces can provide direct evidence to understand their formation, modification, and/or effects on the properties of semiconductor films. The commonly used method, high-resolution transmission electron microscopy (HRTEM), suffers from difficulty in acquiring images that correctly show the crystal structure at atomic resolution, because of the limitation in microscope resolution or deviation from the Scherzer-defocus conditions. In this study, an image processing method, image deconvolution, was used to achieve atomic-resolution (∼1.0 Å) structure images of small lattice-mismatch (∼1.0%) AlN/6H-SiC (0001) and large lattice-mismatch (∼8.5%) AlSb/GaAs (001) heteroepitaxial interfaces using simulated HRTEM images of a conventional 300-kV field-emission-gun transmission electron microscope under non-Scherzer-defocus conditions. Then, atomic-scale chemical compositions at the interface were determined for the atomic intermixing and Lomer dislocation with an atomic step by analyzing the deconvoluted image contrast. Furthermore, the effect of dynamical scattering on contrast analysis was also evaluated for differently weighted atomic columns in the compositions." @default.
- W2783127230 created "2018-01-26" @default.
- W2783127230 creator A5017656643 @default.
- W2783127230 creator A5066657652 @default.
- W2783127230 date "2018-03-01" @default.
- W2783127230 modified "2023-09-23" @default.
- W2783127230 title "Determination of atomic-scale chemical composition at semiconductor heteroepitaxial interfaces by high-resolution transmission electron microscopy" @default.
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- W2783127230 doi "https://doi.org/10.1016/j.micron.2018.01.003" @default.
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- W2783127230 hasPublicationYear "2018" @default.
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