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- W2783248477 abstract "A comparison was made of 6H-SiC surfaces etched with H 2 , C 2 H 4 /H 2 , and HCl/H 2 , and the resulting crystal quality of epitaxial GaN films deposited on these substrates. To remove the many fine scratches and to smooth the rough surfaces typical of commercial SiC substrates, the Si-face 6H-SiC substrates were etched in H 2 , C 2 H 4 /H 2 , and HCl/H 2 at 145 °C. GaN was subsequently deposited on these etched surfaces after first depositing a low temperature GaN buffer layer via metalorganic chemical vapor deposition (MOCVD). The surface morphologies after etching and after GaN deposition were characterized by atomic force microscopy and Normaski differential interference contrast microscopy, while the crystal quality of the GaN films was assessed by double crystal x-ray rocking curves and x-ray topography. 6H-SiC substrate surfaces were improved in terms of the removal of scratches and the reduction of surface roughness, and both surface morphology and crystal quality of the subsequently deposited GaN films were enhanced. However, the dislocation density was not decreased by the surface etching. The best GaN film was produced by etching the substrate in pure H 2 for 40 minutes before growth. Recommendations for the optimum substrate treatment are made." @default.
- W2783248477 created "2018-01-26" @default.
- W2783248477 creator A5000472136 @default.
- W2783248477 creator A5009303904 @default.
- W2783248477 creator A5027299318 @default.
- W2783248477 creator A5060749884 @default.
- W2783248477 creator A5068283765 @default.
- W2783248477 creator A5079073730 @default.
- W2783248477 date "1999-01-01" @default.
- W2783248477 modified "2023-09-24" @default.
- W2783248477 title "Effects of Surface Preparation on Epitaxial GaN on 6H-SiC Deposited Via MOCVD" @default.
- W2783248477 cites W1490241009 @default.
- W2783248477 cites W1967675696 @default.
- W2783248477 cites W1982846393 @default.
- W2783248477 cites W1983541594 @default.
- W2783248477 cites W1984114395 @default.
- W2783248477 cites W1986320163 @default.
- W2783248477 cites W1990541041 @default.
- W2783248477 cites W1993660582 @default.
- W2783248477 cites W2007930532 @default.
- W2783248477 cites W2025613147 @default.
- W2783248477 cites W2056207707 @default.
- W2783248477 cites W2057104940 @default.
- W2783248477 cites W2065731801 @default.
- W2783248477 doi "https://doi.org/10.1557/s1092578300002593" @default.
- W2783248477 hasPublicationYear "1999" @default.
- W2783248477 type Work @default.
- W2783248477 sameAs 2783248477 @default.
- W2783248477 citedByCount "1" @default.
- W2783248477 crossrefType "journal-article" @default.
- W2783248477 hasAuthorship W2783248477A5000472136 @default.
- W2783248477 hasAuthorship W2783248477A5009303904 @default.
- W2783248477 hasAuthorship W2783248477A5027299318 @default.
- W2783248477 hasAuthorship W2783248477A5060749884 @default.
- W2783248477 hasAuthorship W2783248477A5068283765 @default.
- W2783248477 hasAuthorship W2783248477A5079073730 @default.
- W2783248477 hasBestOaLocation W27832484771 @default.
- W2783248477 hasConcept C100460472 @default.
- W2783248477 hasConcept C107365816 @default.
- W2783248477 hasConcept C110738630 @default.
- W2783248477 hasConcept C111368507 @default.
- W2783248477 hasConcept C127313418 @default.
- W2783248477 hasConcept C159122135 @default.
- W2783248477 hasConcept C159985019 @default.
- W2783248477 hasConcept C171250308 @default.
- W2783248477 hasConcept C175665537 @default.
- W2783248477 hasConcept C192562407 @default.
- W2783248477 hasConcept C199360897 @default.
- W2783248477 hasConcept C2777289219 @default.
- W2783248477 hasConcept C2779227376 @default.
- W2783248477 hasConcept C2781285689 @default.
- W2783248477 hasConcept C41008148 @default.
- W2783248477 hasConcept C49040817 @default.
- W2783248477 hasConcept C57410435 @default.
- W2783248477 hasConcept C71039073 @default.
- W2783248477 hasConceptScore W2783248477C100460472 @default.
- W2783248477 hasConceptScore W2783248477C107365816 @default.
- W2783248477 hasConceptScore W2783248477C110738630 @default.
- W2783248477 hasConceptScore W2783248477C111368507 @default.
- W2783248477 hasConceptScore W2783248477C127313418 @default.
- W2783248477 hasConceptScore W2783248477C159122135 @default.
- W2783248477 hasConceptScore W2783248477C159985019 @default.
- W2783248477 hasConceptScore W2783248477C171250308 @default.
- W2783248477 hasConceptScore W2783248477C175665537 @default.
- W2783248477 hasConceptScore W2783248477C192562407 @default.
- W2783248477 hasConceptScore W2783248477C199360897 @default.
- W2783248477 hasConceptScore W2783248477C2777289219 @default.
- W2783248477 hasConceptScore W2783248477C2779227376 @default.
- W2783248477 hasConceptScore W2783248477C2781285689 @default.
- W2783248477 hasConceptScore W2783248477C41008148 @default.
- W2783248477 hasConceptScore W2783248477C49040817 @default.
- W2783248477 hasConceptScore W2783248477C57410435 @default.
- W2783248477 hasConceptScore W2783248477C71039073 @default.
- W2783248477 hasLocation W27832484771 @default.
- W2783248477 hasOpenAccess W2783248477 @default.
- W2783248477 hasPrimaryLocation W27832484771 @default.
- W2783248477 hasRelatedWork W1971940500 @default.
- W2783248477 hasRelatedWork W2015431089 @default.
- W2783248477 hasRelatedWork W2027809676 @default.
- W2783248477 hasRelatedWork W2042983708 @default.
- W2783248477 hasRelatedWork W2055901008 @default.
- W2783248477 hasRelatedWork W2067347018 @default.
- W2783248477 hasRelatedWork W2080707396 @default.
- W2783248477 hasRelatedWork W2087536784 @default.
- W2783248477 hasRelatedWork W2128697078 @default.
- W2783248477 hasRelatedWork W2131338929 @default.
- W2783248477 hasRelatedWork W2198758626 @default.
- W2783248477 hasRelatedWork W2214038814 @default.
- W2783248477 hasRelatedWork W2316384057 @default.
- W2783248477 hasRelatedWork W2328815114 @default.
- W2783248477 hasRelatedWork W2341420366 @default.
- W2783248477 hasRelatedWork W2365259411 @default.
- W2783248477 hasRelatedWork W2549781423 @default.
- W2783248477 hasRelatedWork W2582727609 @default.
- W2783248477 hasRelatedWork W3183975509 @default.
- W2783248477 hasRelatedWork W321256071 @default.
- W2783248477 isParatext "false" @default.
- W2783248477 isRetracted "false" @default.
- W2783248477 magId "2783248477" @default.
- W2783248477 workType "article" @default.