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• W2783309999 abstract "Demands for wireless communication are ever-escalating for consumer and military communication applications. The requirements of portability, more functionality and lower cost have been driving forces toward smaller, more sophisticated and flexible wireless devices with lower power consumption. To meet these requirements, monolithically integrated passive inductors with high Q-factors and high self-resonant frequencies are desirable. Q-factor and self-resonant frequency of an inductor are significantly degraded at high frequencies due to conductor ohmic loss, magnetically induced eddy current in the conductive substrate, and lower self-resonant frequency from capacitance between conductive substrate and conductors. In this dissertation, novel three-dimensional arch-like solenoid and dome-shaped spiral inductors are designed, fabricated, and characterized. MEMS-based fabrication techniques such as copper electroplating through voids in thick SU-8 photoresist molds and EAGLE2100 conformal photoresist molds on sacrificial arch-like or dome-shape SJR5740 photoresist mounds are utilized. An air gap between the inductor and the silicon substrate is used to reduce the degradations of inductor performance. According to the Sonnet electromagnetic simulations, 30 μm air-gap suspension over the substrate is an adequate choice for these inductors. Suspended arch-like solenoid copper inductor has flat bottom conductor connected to arch-like top conductor with an air core in between. This design has only 2 contact points per inductor turn to minimize series resistance. Suspended domeshaped spiral copper inductor is fabricated on a sacrificial photoresist dome with the outer end connected to one probe pad, and the inner end connected to the other probe pad through vias and an air-bridge. The sidewalls of spiral turns in this design overlap less with each other thereby reducing inter-turn capacitances. Fabricated inductors are characterized and modeled at high frequencies from Sparameter measurements. ABCD-parameters, derived from the S-parameters are translated into a simplified physical π-model. The resulting arch-like suspended inductors with 2-5 turns have inductances between 0.62 to 0.79 nH, peak Q-factor values between 15.42 to 17 at peak-Q frequencies between 4.7 GHz to 7.0 GHz, and self-resonant frequencies between 47.6 GHz to 88.6 GHz. The 3-turn dome-shaped spiral inductor has inductance of 3.37 nH, peak Q-factor of 35.9 at 1.65 GHz, and self-resonant frequency at 18.74 GHz." @default.
• W2783309999 created "2018-01-26" @default.
• W2783309999 creator A5054195728 @default.
• W2783309999 date "2022-06-10" @default.
• W2783309999 modified "2023-10-15" @default.
• W2783309999 title "Three-dimensional micromachined on-chip inductors for high frequency applications" @default.
• W2783309999 cites W1583449596 @default.
• W2783309999 cites W1601351606 @default.
• W2783309999 cites W1963808541 @default.
• W2783309999 cites W1977631284 @default.
• W2783309999 cites W1979002201 @default.
• W2783309999 cites W2006355293 @default.
• W2783309999 cites W2008051929 @default.
• W2783309999 cites W2018008910 @default.
• W2783309999 cites W2046229174 @default.
• W2783309999 cites W2047146054 @default.
• W2783309999 cites W2066059913 @default.
• W2783309999 cites W2077188638 @default.
• W2783309999 cites W2080854208 @default.
• W2783309999 cites W2082983861 @default.
• W2783309999 cites W2097288895 @default.
• W2783309999 cites W2097941400 @default.
• W2783309999 cites W2101680126 @default.
• W2783309999 cites W2107937861 @default.
• W2783309999 cites W2109832933 @default.
• W2783309999 cites W2111621025 @default.
• W2783309999 cites W2114806447 @default.
• W2783309999 cites W2119412547 @default.
• W2783309999 cites W2121538149 @default.
• W2783309999 cites W2128128047 @default.
• W2783309999 cites W2128472887 @default.
• W2783309999 cites W2128663755 @default.
• W2783309999 cites W2133979361 @default.
• W2783309999 cites W2138616706 @default.
• W2783309999 cites W2149761042 @default.
• W2783309999 cites W2157598626 @default.
• W2783309999 cites W2158498039 @default.
• W2783309999 cites W2159469281 @default.
• W2783309999 cites W2160428624 @default.
• W2783309999 cites W2160509477 @default.
• W2783309999 cites W2162802498 @default.
• W2783309999 cites W2163768806 @default.
• W2783309999 cites W2164292894 @default.
• W2783309999 cites W2164888389 @default.
• W2783309999 cites W2167004581 @default.
• W2783309999 cites W2534510865 @default.
• W2783309999 cites W2544794017 @default.
• W2783309999 cites W3119091992 @default.
• W2783309999 cites W3215260922 @default.
• W2783309999 cites W648069148 @default.
• W2783309999 cites W86206252 @default.
• W2783309999 cites W2552829344 @default.
• W2783309999 doi "https://doi.org/10.31390/gradschool_dissertations.2572" @default.
• W2783309999 hasPublicationYear "2022" @default.
• W2783309999 type Work @default.
• W2783309999 sameAs 2783309999 @default.
• W2783309999 citedByCount "1" @default.
• W2783309999 countsByYear W27833099992016 @default.
• W2783309999 crossrefType "dissertation" @default.
• W2783309999 hasAuthorship W2783309999A5054195728 @default.
• W2783309999 hasBestOaLocation W27833099991 @default.
• W2783309999 hasConcept C111368507 @default.
• W2783309999 hasConcept C119599485 @default.
• W2783309999 hasConcept C121332964 @default.
• W2783309999 hasConcept C127313418 @default.
• W2783309999 hasConcept C127413603 @default.
• W2783309999 hasConcept C134406635 @default.
• W2783309999 hasConcept C144534570 @default.
• W2783309999 hasConcept C154318817 @default.
• W2783309999 hasConcept C159985019 @default.
• W2783309999 hasConcept C165801399 @default.
• W2783309999 hasConcept C17525397 @default.
• W2783309999 hasConcept C192144188 @default.
• W2783309999 hasConcept C192562407 @default.
• W2783309999 hasConcept C202374169 @default.
• W2783309999 hasConcept C2777289219 @default.
• W2783309999 hasConcept C2779227376 @default.
• W2783309999 hasConcept C30066665 @default.
• W2783309999 hasConcept C49040817 @default.
• W2783309999 hasConcept C62520636 @default.
• W2783309999 hasConceptScore W2783309999C111368507 @default.
• W2783309999 hasConceptScore W2783309999C119599485 @default.
• W2783309999 hasConceptScore W2783309999C121332964 @default.
• W2783309999 hasConceptScore W2783309999C127313418 @default.
• W2783309999 hasConceptScore W2783309999C127413603 @default.
• W2783309999 hasConceptScore W2783309999C134406635 @default.
• W2783309999 hasConceptScore W2783309999C144534570 @default.
• W2783309999 hasConceptScore W2783309999C154318817 @default.
• W2783309999 hasConceptScore W2783309999C159985019 @default.
• W2783309999 hasConceptScore W2783309999C165801399 @default.
• W2783309999 hasConceptScore W2783309999C17525397 @default.
• W2783309999 hasConceptScore W2783309999C192144188 @default.
• W2783309999 hasConceptScore W2783309999C192562407 @default.
• W2783309999 hasConceptScore W2783309999C202374169 @default.
• W2783309999 hasConceptScore W2783309999C2777289219 @default.
• W2783309999 hasConceptScore W2783309999C2779227376 @default.
• W2783309999 hasConceptScore W2783309999C30066665 @default.
• W2783309999 hasConceptScore W2783309999C49040817 @default.
• W2783309999 hasConceptScore W2783309999C62520636 @default.
• W2783309999 hasLocation W27833099991 @default.

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