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• W2783451261 endingPage "32" @default.
• W2783451261 startingPage "32" @default.
• W2783451261 abstract "The effect of abrasive shape on the three-body abrasion behaviors of monocrystalline silicon was investigated via molecular dynamics. The axial ratio of abrasive particle varied from 1.00 to 0.40 to mimic abrasive shape. It has been observed that the particle’s movement became sliding instead of rolling when the axial ratio was smaller than a critical value 0.46. In the abrasion process, the friction force and normal force showed an approximately sinusoid-like fluctuation for the rolling ellipsoidal particles, while the front cutting of particle caused that friction force increased and became larger than normal force for sliding particles. The phase transformation process was tracked under different particle’ movement patterns. The Si-II and Bct5 phase producing in loading process can partially transform to Si-III/Si-XII phase, and backtrack to original crystal silicon under pressure release, which also occurred in the abrasion process. The secondary phase transformation showed difference for particles’ rolling and sliding movements after three-body abrasion. The rolling of particle induced the periodical and inhomogeneous deformation of substrates, while the sliding benefited producing high-quality surface in chemical mechanical polishing (CMP) process. This study aimed to construct a more precise model to understand the wear mechanism benefits evaluating the micro-electro-mechanical systems (MEMS) wear and CMP process of crystal materials." @default.
• W2783451261 created "2018-01-26" @default.
• W2783451261 creator A5007115500 @default.
• W2783451261 creator A5013856956 @default.
• W2783451261 creator A5015839454 @default.
• W2783451261 creator A5026071162 @default.
• W2783451261 creator A5061699092 @default.
• W2783451261 date "2018-01-12" @default.
• W2783451261 modified "2023-10-16" @default.
• W2783451261 title "Influence of Abrasive Shape on the Abrasion and Phase Transformation of Monocrystalline Silicon" @default.
• W2783451261 cites W1980649189 @default.
• W2783451261 cites W1983818351 @default.
• W2783451261 cites W1984187605 @default.
• W2783451261 cites W1990428659 @default.
• W2783451261 cites W1991471325 @default.
• W2783451261 cites W1996919641 @default.
• W2783451261 cites W1998279942 @default.
• W2783451261 cites W2004802871 @default.
• W2783451261 cites W2014994249 @default.
• W2783451261 cites W2015592638 @default.
• W2783451261 cites W2016652860 @default.
• W2783451261 cites W2017196167 @default.
• W2783451261 cites W2019465613 @default.
• W2783451261 cites W2019718670 @default.
• W2783451261 cites W2028370081 @default.
• W2783451261 cites W2028471641 @default.
• W2783451261 cites W2029264063 @default.
• W2783451261 cites W2034423981 @default.
• W2783451261 cites W2039959185 @default.
• W2783451261 cites W2044768912 @default.
• W2783451261 cites W2046204593 @default.
• W2783451261 cites W2049803772 @default.
• W2783451261 cites W2052070731 @default.
• W2783451261 cites W2059674993 @default.
• W2783451261 cites W2060271526 @default.
• W2783451261 cites W2063888831 @default.
• W2783451261 cites W2069042781 @default.
• W2783451261 cites W2072299616 @default.
• W2783451261 cites W2081751866 @default.
• W2783451261 cites W2100342067 @default.
• W2783451261 cites W2122991330 @default.
• W2783451261 cites W2127767984 @default.
• W2783451261 cites W2128308569 @default.
• W2783451261 cites W2131003687 @default.
• W2783451261 cites W2140102233 @default.
• W2783451261 cites W2155684746 @default.
• W2783451261 cites W2194501513 @default.
• W2783451261 cites W2409652493 @default.
• W2783451261 cites W2415374455 @default.
• W2783451261 cites W2416085306 @default.
• W2783451261 cites W2482816461 @default.
• W2783451261 cites W2616130065 @default.
• W2783451261 cites W2626757445 @default.
• W2783451261 cites W3099802872 @default.
• W2783451261 doi "https://doi.org/10.3390/cryst8010032" @default.
• W2783451261 hasPublicationYear "2018" @default.
• W2783451261 type Work @default.
• W2783451261 sameAs 2783451261 @default.
• W2783451261 citedByCount "10" @default.
• W2783451261 countsByYear W27834512612018 @default.
• W2783451261 countsByYear W27834512612019 @default.
• W2783451261 countsByYear W27834512612020 @default.
• W2783451261 countsByYear W27834512612021 @default.
• W2783451261 countsByYear W27834512612023 @default.
• W2783451261 crossrefType "journal-article" @default.
• W2783451261 hasAuthorship W2783451261A5007115500 @default.
• W2783451261 hasAuthorship W2783451261A5013856956 @default.
• W2783451261 hasAuthorship W2783451261A5015839454 @default.
• W2783451261 hasAuthorship W2783451261A5026071162 @default.
• W2783451261 hasAuthorship W2783451261A5061699092 @default.
• W2783451261 hasBestOaLocation W27834512611 @default.
• W2783451261 hasConcept C111368507 @default.
• W2783451261 hasConcept C118231568 @default.
• W2783451261 hasConcept C121332964 @default.
• W2783451261 hasConcept C127313418 @default.
• W2783451261 hasConcept C138113353 @default.
• W2783451261 hasConcept C159985019 @default.
• W2783451261 hasConcept C165846633 @default.
• W2783451261 hasConcept C178790620 @default.
• W2783451261 hasConcept C180088628 @default.
• W2783451261 hasConcept C185592680 @default.
• W2783451261 hasConcept C191897082 @default.
• W2783451261 hasConcept C192562407 @default.
• W2783451261 hasConcept C26953177 @default.
• W2783451261 hasConcept C2778517922 @default.
• W2783451261 hasConcept C2780957350 @default.
• W2783451261 hasConcept C44280652 @default.
• W2783451261 hasConcept C544956773 @default.
• W2783451261 hasConcept C57879066 @default.
• W2783451261 hasConceptScore W2783451261C111368507 @default.
• W2783451261 hasConceptScore W2783451261C118231568 @default.
• W2783451261 hasConceptScore W2783451261C121332964 @default.
• W2783451261 hasConceptScore W2783451261C127313418 @default.
• W2783451261 hasConceptScore W2783451261C138113353 @default.
• W2783451261 hasConceptScore W2783451261C159985019 @default.
• W2783451261 hasConceptScore W2783451261C165846633 @default.
• W2783451261 hasConceptScore W2783451261C178790620 @default.
• W2783451261 hasConceptScore W2783451261C180088628 @default.

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