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- W2785227704 abstract "This thesis was carried out in an industrial context of strong competition in connection with miniature silicon sensors for the huge so-called “consumer” market, where the “Smartphone” is the killer application; its increasing functionality creates a need for the so-called ‘10-axis' inertial multi-sensors (3-axis accelerometer, 3-axis magnetometer, 3-axis gyro sensor and pressure). Similarly to integrated circuits, cost constraints on such sensors translate into a requirement in terms of integration density. The M & NEMS (Micro- & Nano- Electro-Mechanical-Systems) technology has been developed to meet this expectation. It is based on the integration of nanoscale (~ 250 nm) strain gauges together with micrometric electromechanical structures, which ensure unrivaled compactness, paving the way for the co-integration of multiple inertial sensors on the same silicon chip. However, the different nature of the physical quantities to be measured imposes additional constraints, sometimes conflicting, which leads to a difficult co-integration. Based on this observation, we have explored and developed solutions to allow operation under the same ambient pressure, of accelerometers together with Coriolis force based gyroscopes. This issue of co-integration extends beyond the accelerometer-gyroscope couple. Issues inherent to the pressure sensor and to the 3-axis accelerometer measurements, are also addressed in this thesis" @default.
- W2785227704 created "2018-02-02" @default.
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- W2785227704 date "2013-10-08" @default.
- W2785227704 modified "2023-09-25" @default.
- W2785227704 title "Towards ultra-compact inertial platforms based on piezoresistive nanogauges : focus on co-integration issues" @default.
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