Matches in SemOpenAlex for { <https://semopenalex.org/work/W2785496775> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2785496775 abstract "On Si{100} surfaces etched in anisotropic etchants such as aqueous solutions KOH and TMAH, pyramidal etch hillocks are frequently found. Besides these hillocks, we have investigated hillocks that have partially disappeared using scanning electron microscopy (SEM). During re-etching numerous additional pyramidal etch hillocks are formed on the exact spots where SEM pictures were made earlier. These observations suggest that semipermeable particles adhering to the surface are responsible for the development of the pyramidal etch hillocks. In order to investigate the influence of such nanometer scale particles on the etch rate and the surface morphology, Monte Carlo simulations were performed of etching of Si{100} surfaces on which small semimasks are present. The presence of the microscopic semimasks is shown to cause the formation of macroscopic hillocks, which closely resemble experimentally observed hillocks. Removal of the semimask on top of a hillock leads to a vanishing pyramidal etch hillock. In the Monte Carlo model, however, the etch rate as a function of surface orientation has a maximum for {100}, while in reality {100} corresponds to a local minimum. This implies that for typical experimental conditions an etch hillock should not be stable despite a semipermeable particle on top, because of underetching starting from ridges of the hillock. This paradox can be resolved by assuming that the ridges act as sinks of tiny particles. This gives a reduction in etch rate of the ridges, next to the top, which is necessary for the hillock to remain stable. The exact nature of these masking particles is unknown, but silicate particles are a likely candidate" @default.
- W2785496775 created "2018-02-23" @default.
- W2785496775 creator A5003090623 @default.
- W2785496775 creator A5006275680 @default.
- W2785496775 creator A5008973816 @default.
- W2785496775 creator A5024795807 @default.
- W2785496775 creator A5025799304 @default.
- W2785496775 creator A5046836579 @default.
- W2785496775 creator A5048137676 @default.
- W2785496775 creator A5079929913 @default.
- W2785496775 creator A5091177139 @default.
- W2785496775 date "2000-10-01" @default.
- W2785496775 modified "2023-09-23" @default.
- W2785496775 title "Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation" @default.
- W2785496775 hasPublicationYear "2000" @default.
- W2785496775 type Work @default.
- W2785496775 sameAs 2785496775 @default.
- W2785496775 citedByCount "0" @default.
- W2785496775 crossrefType "journal-article" @default.
- W2785496775 hasAuthorship W2785496775A5003090623 @default.
- W2785496775 hasAuthorship W2785496775A5006275680 @default.
- W2785496775 hasAuthorship W2785496775A5008973816 @default.
- W2785496775 hasAuthorship W2785496775A5024795807 @default.
- W2785496775 hasAuthorship W2785496775A5025799304 @default.
- W2785496775 hasAuthorship W2785496775A5046836579 @default.
- W2785496775 hasAuthorship W2785496775A5048137676 @default.
- W2785496775 hasAuthorship W2785496775A5079929913 @default.
- W2785496775 hasAuthorship W2785496775A5091177139 @default.
- W2785496775 hasConcept C100460472 @default.
- W2785496775 hasConcept C105795698 @default.
- W2785496775 hasConcept C120665830 @default.
- W2785496775 hasConcept C121332964 @default.
- W2785496775 hasConcept C159985019 @default.
- W2785496775 hasConcept C171250308 @default.
- W2785496775 hasConcept C185592680 @default.
- W2785496775 hasConcept C192562407 @default.
- W2785496775 hasConcept C19499675 @default.
- W2785496775 hasConcept C2779227376 @default.
- W2785496775 hasConcept C33923547 @default.
- W2785496775 hasConcept C41999313 @default.
- W2785496775 hasConcept C45786274 @default.
- W2785496775 hasConcept C6322943 @default.
- W2785496775 hasConcept C81626474 @default.
- W2785496775 hasConcept C85725439 @default.
- W2785496775 hasConceptScore W2785496775C100460472 @default.
- W2785496775 hasConceptScore W2785496775C105795698 @default.
- W2785496775 hasConceptScore W2785496775C120665830 @default.
- W2785496775 hasConceptScore W2785496775C121332964 @default.
- W2785496775 hasConceptScore W2785496775C159985019 @default.
- W2785496775 hasConceptScore W2785496775C171250308 @default.
- W2785496775 hasConceptScore W2785496775C185592680 @default.
- W2785496775 hasConceptScore W2785496775C192562407 @default.
- W2785496775 hasConceptScore W2785496775C19499675 @default.
- W2785496775 hasConceptScore W2785496775C2779227376 @default.
- W2785496775 hasConceptScore W2785496775C33923547 @default.
- W2785496775 hasConceptScore W2785496775C41999313 @default.
- W2785496775 hasConceptScore W2785496775C45786274 @default.
- W2785496775 hasConceptScore W2785496775C6322943 @default.
- W2785496775 hasConceptScore W2785496775C81626474 @default.
- W2785496775 hasConceptScore W2785496775C85725439 @default.
- W2785496775 hasLocation W27854967751 @default.
- W2785496775 hasOpenAccess W2785496775 @default.
- W2785496775 hasPrimaryLocation W27854967751 @default.
- W2785496775 hasRelatedWork W1588867162 @default.
- W2785496775 hasRelatedWork W1979793403 @default.
- W2785496775 hasRelatedWork W1985321013 @default.
- W2785496775 hasRelatedWork W1985352398 @default.
- W2785496775 hasRelatedWork W1990582527 @default.
- W2785496775 hasRelatedWork W1996629364 @default.
- W2785496775 hasRelatedWork W2001182896 @default.
- W2785496775 hasRelatedWork W2008354502 @default.
- W2785496775 hasRelatedWork W2024214256 @default.
- W2785496775 hasRelatedWork W2029628263 @default.
- W2785496775 hasRelatedWork W2045153757 @default.
- W2785496775 hasRelatedWork W2045864255 @default.
- W2785496775 hasRelatedWork W2054872252 @default.
- W2785496775 hasRelatedWork W2069437548 @default.
- W2785496775 hasRelatedWork W2075252170 @default.
- W2785496775 hasRelatedWork W2089381400 @default.
- W2785496775 hasRelatedWork W2105824617 @default.
- W2785496775 hasRelatedWork W2155879157 @default.
- W2785496775 hasRelatedWork W2314749207 @default.
- W2785496775 hasRelatedWork W2391093140 @default.
- W2785496775 isParatext "false" @default.
- W2785496775 isRetracted "false" @default.
- W2785496775 magId "2785496775" @default.
- W2785496775 workType "article" @default.