Matches in SemOpenAlex for { <https://semopenalex.org/work/W2785679932> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2785679932 abstract "We have fabricated self-aligned InGaSb p-channel FinFETs using a novel antimonide-compatible digital etch. This is the first demonstration of digital etch on InGaSb-based transistors of any kind. It has enabled the first fabricated InGaSb FinFETs featuring fin widths down to 10 nm and gate lengths of 20 nm. Single fin transistors with Wf = 10 nm and channel height of 23 nm (fin aspect ratio of 2.3) have achieved a record transconductance of 160 μS/μm at V <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>ds</inf> = 0.5 V. When normalized to device footprint, it reaches a record high gm = 704 μS/μm. Digital etch has been shown to effectively improve the turn-off characteristics of the devices." @default.
- W2785679932 created "2018-02-23" @default.
- W2785679932 creator A5018818772 @default.
- W2785679932 creator A5031440338 @default.
- W2785679932 creator A5041741425 @default.
- W2785679932 creator A5057908119 @default.
- W2785679932 creator A5058598415 @default.
- W2785679932 creator A5071798263 @default.
- W2785679932 creator A5073869547 @default.
- W2785679932 date "2017-12-01" @default.
- W2785679932 modified "2023-09-27" @default.
- W2785679932 title "10-nm Fin-width InGaSb p-channel self-aligned FinFETs using antimonide-compatible digital etch" @default.
- W2785679932 cites W2029648022 @default.
- W2785679932 cites W2035452716 @default.
- W2785679932 cites W2071080726 @default.
- W2785679932 cites W2170333608 @default.
- W2785679932 cites W2326209608 @default.
- W2785679932 cites W2500854597 @default.
- W2785679932 cites W2583531785 @default.
- W2785679932 cites W2604615674 @default.
- W2785679932 doi "https://doi.org/10.1109/iedm.2017.8268412" @default.
- W2785679932 hasPublicationYear "2017" @default.
- W2785679932 type Work @default.
- W2785679932 sameAs 2785679932 @default.
- W2785679932 citedByCount "14" @default.
- W2785679932 countsByYear W27856799322018 @default.
- W2785679932 countsByYear W27856799322019 @default.
- W2785679932 countsByYear W27856799322020 @default.
- W2785679932 countsByYear W27856799322021 @default.
- W2785679932 countsByYear W27856799322022 @default.
- W2785679932 countsByYear W27856799322023 @default.
- W2785679932 crossrefType "proceedings-article" @default.
- W2785679932 hasAuthorship W2785679932A5018818772 @default.
- W2785679932 hasAuthorship W2785679932A5031440338 @default.
- W2785679932 hasAuthorship W2785679932A5041741425 @default.
- W2785679932 hasAuthorship W2785679932A5057908119 @default.
- W2785679932 hasAuthorship W2785679932A5058598415 @default.
- W2785679932 hasAuthorship W2785679932A5071798263 @default.
- W2785679932 hasAuthorship W2785679932A5073869547 @default.
- W2785679932 hasBestOaLocation W27856799322 @default.
- W2785679932 hasConcept C119599485 @default.
- W2785679932 hasConcept C127162648 @default.
- W2785679932 hasConcept C127413603 @default.
- W2785679932 hasConcept C132943942 @default.
- W2785679932 hasConcept C151730666 @default.
- W2785679932 hasConcept C159985019 @default.
- W2785679932 hasConcept C165801399 @default.
- W2785679932 hasConcept C172385210 @default.
- W2785679932 hasConcept C192562407 @default.
- W2785679932 hasConcept C2777419967 @default.
- W2785679932 hasConcept C2778133893 @default.
- W2785679932 hasConcept C2779283907 @default.
- W2785679932 hasConcept C49040817 @default.
- W2785679932 hasConcept C86803240 @default.
- W2785679932 hasConcept C91721477 @default.
- W2785679932 hasConceptScore W2785679932C119599485 @default.
- W2785679932 hasConceptScore W2785679932C127162648 @default.
- W2785679932 hasConceptScore W2785679932C127413603 @default.
- W2785679932 hasConceptScore W2785679932C132943942 @default.
- W2785679932 hasConceptScore W2785679932C151730666 @default.
- W2785679932 hasConceptScore W2785679932C159985019 @default.
- W2785679932 hasConceptScore W2785679932C165801399 @default.
- W2785679932 hasConceptScore W2785679932C172385210 @default.
- W2785679932 hasConceptScore W2785679932C192562407 @default.
- W2785679932 hasConceptScore W2785679932C2777419967 @default.
- W2785679932 hasConceptScore W2785679932C2778133893 @default.
- W2785679932 hasConceptScore W2785679932C2779283907 @default.
- W2785679932 hasConceptScore W2785679932C49040817 @default.
- W2785679932 hasConceptScore W2785679932C86803240 @default.
- W2785679932 hasConceptScore W2785679932C91721477 @default.
- W2785679932 hasLocation W27856799321 @default.
- W2785679932 hasLocation W27856799322 @default.
- W2785679932 hasOpenAccess W2785679932 @default.
- W2785679932 hasPrimaryLocation W27856799321 @default.
- W2785679932 hasRelatedWork W1679432894 @default.
- W2785679932 hasRelatedWork W1820174176 @default.
- W2785679932 hasRelatedWork W1989783317 @default.
- W2785679932 hasRelatedWork W2025995747 @default.
- W2785679932 hasRelatedWork W2051015503 @default.
- W2785679932 hasRelatedWork W2070036002 @default.
- W2785679932 hasRelatedWork W2094334091 @default.
- W2785679932 hasRelatedWork W236990086 @default.
- W2785679932 hasRelatedWork W2752202705 @default.
- W2785679932 hasRelatedWork W4313411717 @default.
- W2785679932 isParatext "false" @default.
- W2785679932 isRetracted "false" @default.
- W2785679932 magId "2785679932" @default.
- W2785679932 workType "article" @default.