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- W2785706913 abstract "The objective of this work is to improve the optical performance of mirrors on silicon backplane spatial light modulators (SLM). Currently this is done in two stages. The first improvement is achieved through the deposition of a protective coating applied at an appropriate stage in the microfabrication process sequence. Further enhancement is achieved by adding a novel processing stage involving wafer polishing." @default.
- W2785706913 created "2018-02-23" @default.
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- W2785706913 date "1992-01-01" @default.
- W2785706913 modified "2023-10-18" @default.
- W2785706913 title "Improvements in mirror quality of reflective spatial light modulators using dielectric coatings and mechanical polishing" @default.
- W2785706913 cites W2012764659 @default.
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- W2785706913 doi "https://doi.org/10.1364/oic.1992.otha11" @default.
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