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- W2786149013 abstract "Managing the yield of wafer is one of the most important tasks to the semiconductor manufacturers. A lot of efforts for enhancing the yield of wafer have been conducted in both industries and academia. Thanks to the advance of IoT and data analytics techniques, huge amount of process operational data, such as indices of process parameters, equipment condition data, or historical data of manufacturing process, is collected and analyzed in real-time. Though the amount and availability of process operational data have been increased, existing yield management approaches on semiconductor manufacturing process have only considered a single process or few processes among the overall processes. This study proposes a way to find process routes which maximize the yield of wafer (i.e., golden process routes) in view of multiple process steps. This work is expected to complement the existing efforts for managing the yield of wafer by adding results of process-oriented analysis." @default.
- W2786149013 created "2018-02-23" @default.
- W2786149013 creator A5005081871 @default.
- W2786149013 creator A5060939029 @default.
- W2786149013 creator A5061590846 @default.
- W2786149013 creator A5081288145 @default.
- W2786149013 date "2017-12-01" @default.
- W2786149013 modified "2023-10-14" @default.
- W2786149013 title "Determining golden process routes in semiconductor manufacturing process for yield management" @default.
- W2786149013 cites W1602449444 @default.
- W2786149013 cites W1974891604 @default.
- W2786149013 cites W1976692804 @default.
- W2786149013 cites W2016211854 @default.
- W2786149013 cites W2023711088 @default.
- W2786149013 cites W2329413540 @default.
- W2786149013 cites W2533805695 @default.
- W2786149013 cites W2553245249 @default.
- W2786149013 cites W2565085981 @default.
- W2786149013 cites W4236729349 @default.
- W2786149013 doi "https://doi.org/10.1109/ieem.2017.8290315" @default.
- W2786149013 hasPublicationYear "2017" @default.
- W2786149013 type Work @default.
- W2786149013 sameAs 2786149013 @default.
- W2786149013 citedByCount "3" @default.
- W2786149013 countsByYear W27861490132021 @default.
- W2786149013 countsByYear W27861490132022 @default.
- W2786149013 crossrefType "proceedings-article" @default.
- W2786149013 hasAuthorship W2786149013A5005081871 @default.
- W2786149013 hasAuthorship W2786149013A5060939029 @default.
- W2786149013 hasAuthorship W2786149013A5061590846 @default.
- W2786149013 hasAuthorship W2786149013A5081288145 @default.
- W2786149013 hasConcept C111919701 @default.
- W2786149013 hasConcept C117671659 @default.
- W2786149013 hasConcept C121955636 @default.
- W2786149013 hasConcept C127413603 @default.
- W2786149013 hasConcept C134121241 @default.
- W2786149013 hasConcept C142038384 @default.
- W2786149013 hasConcept C144133560 @default.
- W2786149013 hasConcept C159985019 @default.
- W2786149013 hasConcept C160671074 @default.
- W2786149013 hasConcept C171250308 @default.
- W2786149013 hasConcept C191897082 @default.
- W2786149013 hasConcept C192562407 @default.
- W2786149013 hasConcept C195487862 @default.
- W2786149013 hasConcept C21880701 @default.
- W2786149013 hasConcept C2781386248 @default.
- W2786149013 hasConcept C2987875673 @default.
- W2786149013 hasConcept C41008148 @default.
- W2786149013 hasConcept C66018809 @default.
- W2786149013 hasConcept C98045186 @default.
- W2786149013 hasConceptScore W2786149013C111919701 @default.
- W2786149013 hasConceptScore W2786149013C117671659 @default.
- W2786149013 hasConceptScore W2786149013C121955636 @default.
- W2786149013 hasConceptScore W2786149013C127413603 @default.
- W2786149013 hasConceptScore W2786149013C134121241 @default.
- W2786149013 hasConceptScore W2786149013C142038384 @default.
- W2786149013 hasConceptScore W2786149013C144133560 @default.
- W2786149013 hasConceptScore W2786149013C159985019 @default.
- W2786149013 hasConceptScore W2786149013C160671074 @default.
- W2786149013 hasConceptScore W2786149013C171250308 @default.
- W2786149013 hasConceptScore W2786149013C191897082 @default.
- W2786149013 hasConceptScore W2786149013C192562407 @default.
- W2786149013 hasConceptScore W2786149013C195487862 @default.
- W2786149013 hasConceptScore W2786149013C21880701 @default.
- W2786149013 hasConceptScore W2786149013C2781386248 @default.
- W2786149013 hasConceptScore W2786149013C2987875673 @default.
- W2786149013 hasConceptScore W2786149013C41008148 @default.
- W2786149013 hasConceptScore W2786149013C66018809 @default.
- W2786149013 hasConceptScore W2786149013C98045186 @default.
- W2786149013 hasLocation W27861490131 @default.
- W2786149013 hasOpenAccess W2786149013 @default.
- W2786149013 hasPrimaryLocation W27861490131 @default.
- W2786149013 hasRelatedWork W1967079654 @default.
- W2786149013 hasRelatedWork W2051254741 @default.
- W2786149013 hasRelatedWork W2066078706 @default.
- W2786149013 hasRelatedWork W2094386815 @default.
- W2786149013 hasRelatedWork W2120715251 @default.
- W2786149013 hasRelatedWork W2372671187 @default.
- W2786149013 hasRelatedWork W2549906950 @default.
- W2786149013 hasRelatedWork W2576163978 @default.
- W2786149013 hasRelatedWork W2786149013 @default.
- W2786149013 hasRelatedWork W2162091142 @default.
- W2786149013 isParatext "false" @default.
- W2786149013 isRetracted "false" @default.
- W2786149013 magId "2786149013" @default.
- W2786149013 workType "article" @default.