Matches in SemOpenAlex for { <https://semopenalex.org/work/W2786186007> ?p ?o ?g. }
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- W2786186007 endingPage "4" @default.
- W2786186007 startingPage "1" @default.
- W2786186007 abstract "Motional resistance is one of the most important performance metrics for high quality factor, low power, and complementary metal-oxide semiconductor (CMOS)-compatible capacitively transduced vibrating micromechanical resonators. The motional resistance is primarily set by the electrode-to-resonator air gap that can be formed by deep reactive ion etching (DRIE) process. Although the state-of-the-art DRIE technologies can achieve a narrow capacitive air gap down to 1 μm or less, the effective gap tends to be larger than designed values due to the sidewall roughness known as scalloping. Systematic modifications of all key process parameters are presented in this article for lowering the sidewall roughness to result in an up to 2× reduction of the effective capacitive transducer gap, which could lead to an up to 16× decrease of the effective motional resistance." @default.
- W2786186007 created "2018-02-23" @default.
- W2786186007 creator A5012580589 @default.
- W2786186007 creator A5021525692 @default.
- W2786186007 creator A5037677450 @default.
- W2786186007 creator A5067606742 @default.
- W2786186007 creator A5087831891 @default.
- W2786186007 date "2018-03-01" @default.
- W2786186007 modified "2023-09-25" @default.
- W2786186007 title "Improvement of Deep Reactive Ion Etching Process For Motional Resistance Reduction of Capacitively Transduced Vibrating Resonators" @default.
- W2786186007 cites W1986137058 @default.
- W2786186007 cites W1986982460 @default.
- W2786186007 cites W1999834382 @default.
- W2786186007 cites W2001342617 @default.
- W2786186007 cites W2002169688 @default.
- W2786186007 cites W2015799617 @default.
- W2786186007 cites W2039507372 @default.
- W2786186007 cites W2055317262 @default.
- W2786186007 cites W2064516642 @default.
- W2786186007 cites W2067053840 @default.
- W2786186007 cites W2074329028 @default.
- W2786186007 cites W2076005940 @default.
- W2786186007 cites W2077907851 @default.
- W2786186007 cites W2089486737 @default.
- W2786186007 cites W2099649276 @default.
- W2786186007 cites W2105093937 @default.
- W2786186007 cites W2109233209 @default.
- W2786186007 cites W2124938234 @default.
- W2786186007 cites W2139065856 @default.
- W2786186007 cites W2146351735 @default.
- W2786186007 cites W2157986498 @default.
- W2786186007 cites W2164690066 @default.
- W2786186007 cites W2249412123 @default.
- W2786186007 cites W2512444340 @default.
- W2786186007 cites W2743675207 @default.
- W2786186007 doi "https://doi.org/10.1109/lsens.2018.2797076" @default.
- W2786186007 hasPublicationYear "2018" @default.
- W2786186007 type Work @default.
- W2786186007 sameAs 2786186007 @default.
- W2786186007 citedByCount "4" @default.
- W2786186007 countsByYear W27861860072020 @default.
- W2786186007 countsByYear W27861860072021 @default.
- W2786186007 countsByYear W27861860072022 @default.
- W2786186007 countsByYear W27861860072023 @default.
- W2786186007 crossrefType "journal-article" @default.
- W2786186007 hasAuthorship W2786186007A5012580589 @default.
- W2786186007 hasAuthorship W2786186007A5021525692 @default.
- W2786186007 hasAuthorship W2786186007A5037677450 @default.
- W2786186007 hasAuthorship W2786186007A5067606742 @default.
- W2786186007 hasAuthorship W2786186007A5087831891 @default.
- W2786186007 hasBestOaLocation W27861860071 @default.
- W2786186007 hasConcept C100460472 @default.
- W2786186007 hasConcept C119599485 @default.
- W2786186007 hasConcept C124634506 @default.
- W2786186007 hasConcept C127413603 @default.
- W2786186007 hasConcept C130472188 @default.
- W2786186007 hasConcept C147789679 @default.
- W2786186007 hasConcept C171250308 @default.
- W2786186007 hasConcept C17525397 @default.
- W2786186007 hasConcept C185592680 @default.
- W2786186007 hasConcept C192562407 @default.
- W2786186007 hasConcept C206755178 @default.
- W2786186007 hasConcept C2779227376 @default.
- W2786186007 hasConcept C49040817 @default.
- W2786186007 hasConcept C97126364 @default.
- W2786186007 hasConceptScore W2786186007C100460472 @default.
- W2786186007 hasConceptScore W2786186007C119599485 @default.
- W2786186007 hasConceptScore W2786186007C124634506 @default.
- W2786186007 hasConceptScore W2786186007C127413603 @default.
- W2786186007 hasConceptScore W2786186007C130472188 @default.
- W2786186007 hasConceptScore W2786186007C147789679 @default.
- W2786186007 hasConceptScore W2786186007C171250308 @default.
- W2786186007 hasConceptScore W2786186007C17525397 @default.
- W2786186007 hasConceptScore W2786186007C185592680 @default.
- W2786186007 hasConceptScore W2786186007C192562407 @default.
- W2786186007 hasConceptScore W2786186007C206755178 @default.
- W2786186007 hasConceptScore W2786186007C2779227376 @default.
- W2786186007 hasConceptScore W2786186007C49040817 @default.
- W2786186007 hasConceptScore W2786186007C97126364 @default.
- W2786186007 hasIssue "1" @default.
- W2786186007 hasLocation W27861860071 @default.
- W2786186007 hasOpenAccess W2786186007 @default.
- W2786186007 hasPrimaryLocation W27861860071 @default.
- W2786186007 hasRelatedWork W1975397998 @default.
- W2786186007 hasRelatedWork W2026446194 @default.
- W2786186007 hasRelatedWork W2055317262 @default.
- W2786186007 hasRelatedWork W2114517177 @default.
- W2786186007 hasRelatedWork W2149908434 @default.
- W2786186007 hasRelatedWork W2154256705 @default.
- W2786186007 hasRelatedWork W2697795798 @default.
- W2786186007 hasRelatedWork W2766142451 @default.
- W2786186007 hasRelatedWork W2950224265 @default.
- W2786186007 hasRelatedWork W3190242294 @default.
- W2786186007 hasVolume "2" @default.
- W2786186007 isParatext "false" @default.
- W2786186007 isRetracted "false" @default.
- W2786186007 magId "2786186007" @default.
- W2786186007 workType "article" @default.