Matches in SemOpenAlex for { <https://semopenalex.org/work/W2786553683> ?p ?o ?g. }
- W2786553683 abstract "Abstract We report a fabrication technology for 3D air-core inductors for small footprint and very-high-frequency power conversions. Our process is scalable and highly generic for fabricating inductors with a wide range of geometries and core shapes. We demonstrate spiral, solenoid, and toroidal inductors, a toroidal transformer and inductor with advanced geometries that cannot be produced by wire winding technology. The inductors are embedded in a silicon substrate and consist of through-silicon vias and suspended windings. The inductors fabricated with 20 and 25 turns and 280-350 μm heights on 4-16 mm 2 footprints have an inductance from 34.2 to 44.6 nH and a quality factor from 10 to 13 at frequencies ranging from 30 to 72 MHz. The air-core inductors show threefold lower parasitic capacitance and up to a 140% higher-quality factor and a 230% higher-operation frequency than silicon-core inductors. A 33 MHz boost converter mounted with an air-core toroidal inductor achieves an efficiency of 68.2%, which is better than converters mounted with a Si-core inductor (64.1%). Our inductors show good thermal cycling stability, and they are mechanically stable after vibration and 2-m-drop tests." @default.
- W2786553683 created "2018-02-23" @default.
- W2786553683 creator A5001509611 @default.
- W2786553683 creator A5004524539 @default.
- W2786553683 creator A5006770255 @default.
- W2786553683 creator A5030327369 @default.
- W2786553683 creator A5034125341 @default.
- W2786553683 creator A5036591063 @default.
- W2786553683 creator A5037718122 @default.
- W2786553683 creator A5059034500 @default.
- W2786553683 date "2018-01-29" @default.
- W2786553683 modified "2023-10-16" @default.
- W2786553683 title "Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions" @default.
- W2786553683 cites W1488847324 @default.
- W2786553683 cites W1976592693 @default.
- W2786553683 cites W1978182952 @default.
- W2786553683 cites W1985071116 @default.
- W2786553683 cites W1986065446 @default.
- W2786553683 cites W2007744585 @default.
- W2786553683 cites W2023249502 @default.
- W2786553683 cites W2031805860 @default.
- W2786553683 cites W2032291073 @default.
- W2786553683 cites W2039278466 @default.
- W2786553683 cites W2046094115 @default.
- W2786553683 cites W2047146054 @default.
- W2786553683 cites W2050941820 @default.
- W2786553683 cites W2051188571 @default.
- W2786553683 cites W2062809380 @default.
- W2786553683 cites W2063176254 @default.
- W2786553683 cites W2063315233 @default.
- W2786553683 cites W2066124125 @default.
- W2786553683 cites W2067244227 @default.
- W2786553683 cites W2073527758 @default.
- W2786553683 cites W2079831792 @default.
- W2786553683 cites W2080854208 @default.
- W2786553683 cites W2087417986 @default.
- W2786553683 cites W2092496537 @default.
- W2786553683 cites W2095405396 @default.
- W2786553683 cites W2106165955 @default.
- W2786553683 cites W2106717248 @default.
- W2786553683 cites W2107937861 @default.
- W2786553683 cites W2132618262 @default.
- W2786553683 cites W2146637503 @default.
- W2786553683 cites W2149454230 @default.
- W2786553683 cites W2157598626 @default.
- W2786553683 cites W2160428624 @default.
- W2786553683 cites W2163503917 @default.
- W2786553683 cites W2163729359 @default.
- W2786553683 cites W2165403437 @default.
- W2786553683 cites W2176676826 @default.
- W2786553683 cites W2335168416 @default.
- W2786553683 cites W2342559024 @default.
- W2786553683 cites W2472522812 @default.
- W2786553683 cites W3119091992 @default.
- W2786553683 doi "https://doi.org/10.1038/micronano.2017.82" @default.
- W2786553683 hasPublicationYear "2018" @default.
- W2786553683 type Work @default.
- W2786553683 sameAs 2786553683 @default.
- W2786553683 citedByCount "22" @default.
- W2786553683 countsByYear W27865536832019 @default.
- W2786553683 countsByYear W27865536832020 @default.
- W2786553683 countsByYear W27865536832021 @default.
- W2786553683 countsByYear W27865536832022 @default.
- W2786553683 countsByYear W27865536832023 @default.
- W2786553683 crossrefType "journal-article" @default.
- W2786553683 hasAuthorship W2786553683A5001509611 @default.
- W2786553683 hasAuthorship W2786553683A5004524539 @default.
- W2786553683 hasAuthorship W2786553683A5006770255 @default.
- W2786553683 hasAuthorship W2786553683A5030327369 @default.
- W2786553683 hasAuthorship W2786553683A5034125341 @default.
- W2786553683 hasAuthorship W2786553683A5036591063 @default.
- W2786553683 hasAuthorship W2786553683A5037718122 @default.
- W2786553683 hasAuthorship W2786553683A5059034500 @default.
- W2786553683 hasBestOaLocation W27865536831 @default.
- W2786553683 hasConcept C119599485 @default.
- W2786553683 hasConcept C121332964 @default.
- W2786553683 hasConcept C127413603 @default.
- W2786553683 hasConcept C136525101 @default.
- W2786553683 hasConcept C142724271 @default.
- W2786553683 hasConcept C144534570 @default.
- W2786553683 hasConcept C154318817 @default.
- W2786553683 hasConcept C165801399 @default.
- W2786553683 hasConcept C17525397 @default.
- W2786553683 hasConcept C187725362 @default.
- W2786553683 hasConcept C190024692 @default.
- W2786553683 hasConcept C192562407 @default.
- W2786553683 hasConcept C204787440 @default.
- W2786553683 hasConcept C23832930 @default.
- W2786553683 hasConcept C2778422915 @default.
- W2786553683 hasConcept C29210110 @default.
- W2786553683 hasConcept C30066665 @default.
- W2786553683 hasConcept C30403606 @default.
- W2786553683 hasConcept C37977207 @default.
- W2786553683 hasConcept C49040817 @default.
- W2786553683 hasConcept C62520636 @default.
- W2786553683 hasConcept C71924100 @default.
- W2786553683 hasConcept C97126364 @default.
- W2786553683 hasConceptScore W2786553683C119599485 @default.
- W2786553683 hasConceptScore W2786553683C121332964 @default.
- W2786553683 hasConceptScore W2786553683C127413603 @default.