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• W2787415406 abstract "A technology-computer-aided-design (TCAD)-based topography-simulation model is proposed to simulate chemical-vapor-deposition (CVD) trench filling for SiC superjunction (SJ) devices. Experimental observations, concerning void formation and mesa overetching, are reproduced for the first time by including the Gibbs-Thomson (GT) effect (i.e., the effect of curvature of a growing surface on equilibrium vapor-phase concentration of growing species)." @default.
• W2787415406 created "2018-02-23" @default.
• W2787415406 creator A5040140134 @default.
• W2787415406 creator A5051614581 @default.
• W2787415406 creator A5066173979 @default.
• W2787415406 creator A5069833444 @default.
• W2787415406 creator A5074718916 @default.
• W2787415406 date "2017-12-01" @default.
• W2787415406 modified "2023-09-25" @default.
• W2787415406 title "First topography simulation of SiC-chemical-vapor-deposition trench filling, demonstrating the essential impact of the Gibbs-Thomson effect" @default.
• W2787415406 cites W1482833145 @default.
• W2787415406 cites W153353184 @default.
• W2787415406 cites W1973279362 @default.
• W2787415406 cites W1989124511 @default.
• W2787415406 cites W2004905088 @default.
• W2787415406 cites W2050942389 @default.
• W2787415406 cites W2051523307 @default.
• W2787415406 cites W2078515179 @default.
• W2787415406 cites W2084944373 @default.
• W2787415406 cites W2085804909 @default.
• W2787415406 cites W2097170177 @default.
• W2787415406 cites W2098051712 @default.
• W2787415406 cites W2115385429 @default.
• W2787415406 cites W2118703365 @default.
• W2787415406 cites W2129472836 @default.
• W2787415406 cites W2166824760 @default.
• W2787415406 cites W2264568742 @default.
• W2787415406 cites W2505507599 @default.
• W2787415406 cites W2506710595 @default.
• W2787415406 cites W2544634005 @default.
• W2787415406 cites W2588474859 @default.
• W2787415406 cites W2608106314 @default.
• W2787415406 cites W2612340766 @default.
• W2787415406 cites W2950826896 @default.
• W2787415406 doi "https://doi.org/10.1109/iedm.2017.8268501" @default.
• W2787415406 hasPublicationYear "2017" @default.
• W2787415406 type Work @default.
• W2787415406 sameAs 2787415406 @default.
• W2787415406 citedByCount "2" @default.
• W2787415406 countsByYear W27874154062018 @default.
• W2787415406 countsByYear W27874154062019 @default.
• W2787415406 crossrefType "proceedings-article" @default.
• W2787415406 hasAuthorship W2787415406A5040140134 @default.
• W2787415406 hasAuthorship W2787415406A5051614581 @default.
• W2787415406 hasAuthorship W2787415406A5066173979 @default.
• W2787415406 hasAuthorship W2787415406A5069833444 @default.
• W2787415406 hasAuthorship W2787415406A5074718916 @default.
• W2787415406 hasConcept C127313418 @default.
• W2787415406 hasConcept C151730666 @default.
• W2787415406 hasConcept C155310634 @default.
• W2787415406 hasConcept C159985019 @default.
• W2787415406 hasConcept C171250308 @default.
• W2787415406 hasConcept C192562407 @default.
• W2787415406 hasConcept C195065555 @default.
• W2787415406 hasConcept C2524010 @default.
• W2787415406 hasConcept C2779227376 @default.
• W2787415406 hasConcept C2779772531 @default.
• W2787415406 hasConcept C2816523 @default.
• W2787415406 hasConcept C33923547 @default.
• W2787415406 hasConcept C49040817 @default.
• W2787415406 hasConcept C57410435 @default.
• W2787415406 hasConcept C64297162 @default.
• W2787415406 hasConceptScore W2787415406C127313418 @default.
• W2787415406 hasConceptScore W2787415406C151730666 @default.
• W2787415406 hasConceptScore W2787415406C155310634 @default.
• W2787415406 hasConceptScore W2787415406C159985019 @default.
• W2787415406 hasConceptScore W2787415406C171250308 @default.
• W2787415406 hasConceptScore W2787415406C192562407 @default.
• W2787415406 hasConceptScore W2787415406C195065555 @default.
• W2787415406 hasConceptScore W2787415406C2524010 @default.
• W2787415406 hasConceptScore W2787415406C2779227376 @default.
• W2787415406 hasConceptScore W2787415406C2779772531 @default.
• W2787415406 hasConceptScore W2787415406C2816523 @default.
• W2787415406 hasConceptScore W2787415406C33923547 @default.
• W2787415406 hasConceptScore W2787415406C49040817 @default.
• W2787415406 hasConceptScore W2787415406C57410435 @default.
• W2787415406 hasConceptScore W2787415406C64297162 @default.
• W2787415406 hasLocation W27874154061 @default.
• W2787415406 hasOpenAccess W2787415406 @default.
• W2787415406 hasPrimaryLocation W27874154061 @default.
• W2787415406 hasRelatedWork W1479940591 @default.
• W2787415406 hasRelatedWork W1558464038 @default.
• W2787415406 hasRelatedWork W1914349252 @default.
• W2787415406 hasRelatedWork W1938060651 @default.
• W2787415406 hasRelatedWork W1981968410 @default.
• W2787415406 hasRelatedWork W2018678143 @default.
• W2787415406 hasRelatedWork W2029530099 @default.
• W2787415406 hasRelatedWork W2045179198 @default.
• W2787415406 hasRelatedWork W2076767377 @default.
• W2787415406 hasRelatedWork W2135378842 @default.
• W2787415406 hasRelatedWork W2153313692 @default.
• W2787415406 hasRelatedWork W2158021730 @default.
• W2787415406 hasRelatedWork W2342691784 @default.
• W2787415406 hasRelatedWork W2515260408 @default.
• W2787415406 hasRelatedWork W2788732017 @default.
• W2787415406 hasRelatedWork W2903006241 @default.
• W2787415406 hasRelatedWork W2942594027 @default.
• W2787415406 hasRelatedWork W3023134695 @default.
• W2787415406 hasRelatedWork W3188246571 @default.
• W2787415406 hasRelatedWork W2845810677 @default.

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