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• W2787746867 endingPage "171757" @default.
• W2787746867 startingPage "171757" @default.
• W2787746867 abstract "Metal-organic chemical vapour deposition (MOCVD) is a key technique for fabricating GaN thin film structures for light-emitting and semiconductor laser diodes. Film uniformity is an important index to measure equipment performance and chip processes. This paper introduces a method to improve the quality of thin films by optimizing the rotation speed of different substrates of a model consisting of a planetary with seven 6-inch wafers for the planetary GaN-MOCVD. A numerical solution to the transient state at low pressure is obtained using computational fluid dynamics. To evaluate the role of the different zone speeds on the growth uniformity, single factor analysis is introduced. The results show that the growth rate and uniformity are strongly related to the rotational speed. Next, a response surface model was constructed by using the variables and the corresponding simulation results. The optimized combination of the matching of different speeds is also proposed as a useful reference for applications in industry, obtained by a response surface model and genetic algorithm with a balance between the growth rate and the growth uniformity. This method can save time, and the optimization can obtain the most uniform and highest thin film quality." @default.
• W2787746867 created "2018-02-23" @default.
• W2787746867 creator A5006245338 @default.
• W2787746867 creator A5015676515 @default.
• W2787746867 creator A5030921116 @default.
• W2787746867 creator A5033052908 @default.
• W2787746867 creator A5066542510 @default.
• W2787746867 creator A5075877965 @default.
• W2787746867 creator A5079845893 @default.
• W2787746867 date "2018-02-01" @default.
• W2787746867 modified "2023-10-15" @default.
• W2787746867 title "Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model" @default.
• W2787746867 cites W1860624783 @default.
• W2787746867 cites W1966189626 @default.
• W2787746867 cites W1966649554 @default.
• W2787746867 cites W1969241481 @default.
• W2787746867 cites W1976433632 @default.
• W2787746867 cites W1981664365 @default.
• W2787746867 cites W1991465113 @default.
• W2787746867 cites W2002735533 @default.
• W2787746867 cites W2002881568 @default.
• W2787746867 cites W2003200634 @default.
• W2787746867 cites W2017592918 @default.
• W2787746867 cites W2019260925 @default.
• W2787746867 cites W2021545739 @default.
• W2787746867 cites W2022711294 @default.
• W2787746867 cites W2026736175 @default.
• W2787746867 cites W2030042246 @default.
• W2787746867 cites W2033133548 @default.
• W2787746867 cites W2039778727 @default.
• W2787746867 cites W2050783630 @default.
• W2787746867 cites W2052425051 @default.
• W2787746867 cites W2054005551 @default.
• W2787746867 cites W2064414833 @default.
• W2787746867 cites W2074171195 @default.
• W2787746867 cites W2083186769 @default.
• W2787746867 cites W2114833689 @default.
• W2787746867 cites W2347108005 @default.
• W2787746867 cites W2463011127 @default.
• W2787746867 cites W2464823218 @default.
• W2787746867 cites W2465589300 @default.
• W2787746867 cites W2511825412 @default.
• W2787746867 cites W2541623995 @default.
• W2787746867 cites W2583284940 @default.
• W2787746867 cites W4243367687 @default.
• W2787746867 doi "https://doi.org/10.1098/rsos.171757" @default.
• W2787746867 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/5830772" @default.
• W2787746867 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29515883" @default.
• W2787746867 hasPublicationYear "2018" @default.
• W2787746867 type Work @default.
• W2787746867 sameAs 2787746867 @default.
• W2787746867 citedByCount "11" @default.
• W2787746867 countsByYear W27877468672018 @default.
• W2787746867 countsByYear W27877468672019 @default.
• W2787746867 countsByYear W27877468672020 @default.
• W2787746867 countsByYear W27877468672021 @default.
• W2787746867 countsByYear W27877468672022 @default.
• W2787746867 countsByYear W27877468672023 @default.
• W2787746867 crossrefType "journal-article" @default.
• W2787746867 hasAuthorship W2787746867A5006245338 @default.
• W2787746867 hasAuthorship W2787746867A5015676515 @default.
• W2787746867 hasAuthorship W2787746867A5030921116 @default.
• W2787746867 hasAuthorship W2787746867A5033052908 @default.
• W2787746867 hasAuthorship W2787746867A5066542510 @default.
• W2787746867 hasAuthorship W2787746867A5075877965 @default.
• W2787746867 hasAuthorship W2787746867A5079845893 @default.
• W2787746867 hasBestOaLocation W27877468671 @default.
• W2787746867 hasConcept C110738630 @default.
• W2787746867 hasConcept C121332964 @default.
• W2787746867 hasConcept C127413603 @default.
• W2787746867 hasConcept C151730666 @default.
• W2787746867 hasConcept C159985019 @default.
• W2787746867 hasConcept C160671074 @default.
• W2787746867 hasConcept C1633027 @default.
• W2787746867 hasConcept C171250308 @default.
• W2787746867 hasConcept C175665537 @default.
• W2787746867 hasConcept C19067145 @default.
• W2787746867 hasConcept C192562407 @default.
• W2787746867 hasConcept C2778871202 @default.
• W2787746867 hasConcept C2779227376 @default.
• W2787746867 hasConcept C2816523 @default.
• W2787746867 hasConcept C49040817 @default.
• W2787746867 hasConcept C57410435 @default.
• W2787746867 hasConcept C57879066 @default.
• W2787746867 hasConcept C64297162 @default.
• W2787746867 hasConcept C78519656 @default.
• W2787746867 hasConcept C81063470 @default.
• W2787746867 hasConcept C86803240 @default.
• W2787746867 hasConceptScore W2787746867C110738630 @default.
• W2787746867 hasConceptScore W2787746867C121332964 @default.
• W2787746867 hasConceptScore W2787746867C127413603 @default.
• W2787746867 hasConceptScore W2787746867C151730666 @default.
• W2787746867 hasConceptScore W2787746867C159985019 @default.
• W2787746867 hasConceptScore W2787746867C160671074 @default.
• W2787746867 hasConceptScore W2787746867C1633027 @default.
• W2787746867 hasConceptScore W2787746867C171250308 @default.
• W2787746867 hasConceptScore W2787746867C175665537 @default.
• W2787746867 hasConceptScore W2787746867C19067145 @default.

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