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• W2788248164 abstract "Micro pixel chambers ( μ -PIC) are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB) technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ -PIC is approximately 120 μ m (RMS), however some applications require a fine position resolution of less than 100 μ m. To this end, we have started to develop a μ -PIC based on micro electro mechanical system (MEMS) technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ -PICs to be twice those of PCB μ -PICs at the same anode voltage. We manufactured two MEMS μ -PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ -PICs and we achieved a maximum gain of approximately 7×10 3 and collected their energy spectra under irradiation of X-rays from 55 Fe. However, the measured gains of the MEMS μ -PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ -PICs are diminished by the effect of the silicon used as a semiconducting substrate." @default.
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• W2788248164 date "2018-01-01" @default.
• W2788248164 modified "2023-09-27" @default.
• W2788248164 title "Development of the micro pixel chamber based on MEMS technology" @default.
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• W2788248164 doi "https://doi.org/10.1051/epjconf/201817402010" @default.
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