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- W2789387788 abstract "Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a near-field lens array and generate an array of features with nanoscale resolution.Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a near-field lens array and generate an array of features with nanoscale resolution." @default.
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- W2789387788 date "2009-01-01" @default.
- W2789387788 modified "2023-09-24" @default.
- W2789387788 title "High throughput laser assisted near-field nanomanufacturing" @default.
- W2789387788 doi "https://doi.org/10.2351/1.5061492" @default.
- W2789387788 hasPublicationYear "2009" @default.
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