Matches in SemOpenAlex for { <https://semopenalex.org/work/W2790202026> ?p ?o ?g. }
- W2790202026 endingPage "587" @default.
- W2790202026 startingPage "579" @default.
- W2790202026 abstract "Monolithic 3-D integration has emerged as a promising technological solution for traditional transistor scaling limitations and interconnection bottleneck. The challenge we must overcome is a processing temperature limit for top side devices in order to ensure proper performance of bottom side devices. To solve this problem, we developed a low temperature III–V and Ge layer stacking process using wafer bonding and epitaxial lift-off, since these materials can be processed at a low temperature and provide extended opportunity/functionality (sensor, display, analog, RF, etc.) via heterogeneous integration. In this paper, we discuss technology for integrating III–V and Ge materials and its applicability to CMOS, thin film photodiodes, mid-infrared photonics platforms, and MicroLED display integration for creating the ultimate 3-D chip of the future." @default.
- W2790202026 created "2018-03-29" @default.
- W2790202026 creator A5009691801 @default.
- W2790202026 creator A5015687583 @default.
- W2790202026 creator A5017878656 @default.
- W2790202026 creator A5027287267 @default.
- W2790202026 creator A5033329855 @default.
- W2790202026 creator A5038381495 @default.
- W2790202026 creator A5044553288 @default.
- W2790202026 creator A5051805330 @default.
- W2790202026 creator A5057908119 @default.
- W2790202026 creator A5061180241 @default.
- W2790202026 creator A5067971899 @default.
- W2790202026 creator A5078854391 @default.
- W2790202026 creator A5080591560 @default.
- W2790202026 creator A5082981539 @default.
- W2790202026 creator A5084582582 @default.
- W2790202026 creator A5088752485 @default.
- W2790202026 creator A5090388397 @default.
- W2790202026 date "2018-01-01" @default.
- W2790202026 modified "2023-10-16" @default.
- W2790202026 title "Heterogeneous Integration Toward a Monolithic 3-D Chip Enabled by III–V and Ge Materials" @default.
- W2790202026 cites W1560950418 @default.
- W2790202026 cites W1981220134 @default.
- W2790202026 cites W1983461897 @default.
- W2790202026 cites W1985158061 @default.
- W2790202026 cites W1989826997 @default.
- W2790202026 cites W2022395165 @default.
- W2790202026 cites W2036066386 @default.
- W2790202026 cites W2052940294 @default.
- W2790202026 cites W2069756028 @default.
- W2790202026 cites W2093296199 @default.
- W2790202026 cites W2104156013 @default.
- W2790202026 cites W2250217037 @default.
- W2790202026 cites W2263339996 @default.
- W2790202026 cites W2291611071 @default.
- W2790202026 cites W2298451764 @default.
- W2790202026 cites W2464591606 @default.
- W2790202026 cites W2512427402 @default.
- W2790202026 cites W2512881878 @default.
- W2790202026 cites W2580369392 @default.
- W2790202026 cites W2581128297 @default.
- W2790202026 cites W2583677163 @default.
- W2790202026 cites W2584123617 @default.
- W2790202026 cites W2589345301 @default.
- W2790202026 cites W2598348316 @default.
- W2790202026 cites W2606539242 @default.
- W2790202026 cites W2657466469 @default.
- W2790202026 cites W2734606573 @default.
- W2790202026 cites W2735665134 @default.
- W2790202026 cites W2752516068 @default.
- W2790202026 cites W2783472135 @default.
- W2790202026 cites W2788400084 @default.
- W2790202026 cites W2789732184 @default.
- W2790202026 cites W770970055 @default.
- W2790202026 doi "https://doi.org/10.1109/jeds.2018.2802840" @default.
- W2790202026 hasPublicationYear "2018" @default.
- W2790202026 type Work @default.
- W2790202026 sameAs 2790202026 @default.
- W2790202026 citedByCount "26" @default.
- W2790202026 countsByYear W27902020262018 @default.
- W2790202026 countsByYear W27902020262019 @default.
- W2790202026 countsByYear W27902020262020 @default.
- W2790202026 countsByYear W27902020262021 @default.
- W2790202026 countsByYear W27902020262022 @default.
- W2790202026 countsByYear W27902020262023 @default.
- W2790202026 crossrefType "journal-article" @default.
- W2790202026 hasAuthorship W2790202026A5009691801 @default.
- W2790202026 hasAuthorship W2790202026A5015687583 @default.
- W2790202026 hasAuthorship W2790202026A5017878656 @default.
- W2790202026 hasAuthorship W2790202026A5027287267 @default.
- W2790202026 hasAuthorship W2790202026A5033329855 @default.
- W2790202026 hasAuthorship W2790202026A5038381495 @default.
- W2790202026 hasAuthorship W2790202026A5044553288 @default.
- W2790202026 hasAuthorship W2790202026A5051805330 @default.
- W2790202026 hasAuthorship W2790202026A5057908119 @default.
- W2790202026 hasAuthorship W2790202026A5061180241 @default.
- W2790202026 hasAuthorship W2790202026A5067971899 @default.
- W2790202026 hasAuthorship W2790202026A5078854391 @default.
- W2790202026 hasAuthorship W2790202026A5080591560 @default.
- W2790202026 hasAuthorship W2790202026A5082981539 @default.
- W2790202026 hasAuthorship W2790202026A5084582582 @default.
- W2790202026 hasAuthorship W2790202026A5088752485 @default.
- W2790202026 hasAuthorship W2790202026A5090388397 @default.
- W2790202026 hasBestOaLocation W27902020261 @default.
- W2790202026 hasConcept C119599485 @default.
- W2790202026 hasConcept C121332964 @default.
- W2790202026 hasConcept C123745756 @default.
- W2790202026 hasConcept C127413603 @default.
- W2790202026 hasConcept C149635348 @default.
- W2790202026 hasConcept C160671074 @default.
- W2790202026 hasConcept C165801399 @default.
- W2790202026 hasConcept C172385210 @default.
- W2790202026 hasConcept C192562407 @default.
- W2790202026 hasConcept C20788544 @default.
- W2790202026 hasConcept C24326235 @default.
- W2790202026 hasConcept C2779133538 @default.
- W2790202026 hasConcept C2780513914 @default.