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- W2790377259 abstract "We present preliminary through-pellicle imaging using a 30nm tabletop extreme ultraviolet (EUV) coherent diffractive imaging microscope. We show that even in a non-optimized setup, this technique enables through-pellicle imaging of a sample with no detectable impact on image fidelity or resolution." @default.
- W2790377259 created "2018-03-29" @default.
- W2790377259 creator A5023764298 @default.
- W2790377259 creator A5026899965 @default.
- W2790377259 creator A5035705255 @default.
- W2790377259 creator A5050273176 @default.
- W2790377259 creator A5050781069 @default.
- W2790377259 creator A5051000772 @default.
- W2790377259 creator A5051823301 @default.
- W2790377259 creator A5082853262 @default.
- W2790377259 creator A5088171839 @default.
- W2790377259 creator A5089786173 @default.
- W2790377259 date "2018-03-13" @default.
- W2790377259 modified "2023-10-02" @default.
- W2790377259 title "Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source" @default.
- W2790377259 cites W1967309257 @default.
- W2790377259 cites W1970017443 @default.
- W2790377259 cites W2006654693 @default.
- W2790377259 cites W2068783232 @default.
- W2790377259 cites W2143847003 @default.
- W2790377259 cites W2165161875 @default.
- W2790377259 cites W2309284326 @default.
- W2790377259 cites W2597958772 @default.
- W2790377259 doi "https://doi.org/10.1117/12.2307861" @default.
- W2790377259 hasPublicationYear "2018" @default.
- W2790377259 type Work @default.
- W2790377259 sameAs 2790377259 @default.
- W2790377259 citedByCount "0" @default.
- W2790377259 crossrefType "proceedings-article" @default.
- W2790377259 hasAuthorship W2790377259A5023764298 @default.
- W2790377259 hasAuthorship W2790377259A5026899965 @default.
- W2790377259 hasAuthorship W2790377259A5035705255 @default.
- W2790377259 hasAuthorship W2790377259A5050273176 @default.
- W2790377259 hasAuthorship W2790377259A5050781069 @default.
- W2790377259 hasAuthorship W2790377259A5051000772 @default.
- W2790377259 hasAuthorship W2790377259A5051823301 @default.
- W2790377259 hasAuthorship W2790377259A5082853262 @default.
- W2790377259 hasAuthorship W2790377259A5088171839 @default.
- W2790377259 hasAuthorship W2790377259A5089786173 @default.
- W2790377259 hasConcept C102519508 @default.
- W2790377259 hasConcept C120665830 @default.
- W2790377259 hasConcept C121332964 @default.
- W2790377259 hasConcept C12952745 @default.
- W2790377259 hasConcept C146024833 @default.
- W2790377259 hasConcept C147080431 @default.
- W2790377259 hasConcept C162996421 @default.
- W2790377259 hasConcept C192562407 @default.
- W2790377259 hasConcept C198531522 @default.
- W2790377259 hasConcept C2776459999 @default.
- W2790377259 hasConcept C41008148 @default.
- W2790377259 hasConcept C520434653 @default.
- W2790377259 hasConcept C62520636 @default.
- W2790377259 hasConcept C67649825 @default.
- W2790377259 hasConcept C76155785 @default.
- W2790377259 hasConcept C81793267 @default.
- W2790377259 hasConcept C97355855 @default.
- W2790377259 hasConceptScore W2790377259C102519508 @default.
- W2790377259 hasConceptScore W2790377259C120665830 @default.
- W2790377259 hasConceptScore W2790377259C121332964 @default.
- W2790377259 hasConceptScore W2790377259C12952745 @default.
- W2790377259 hasConceptScore W2790377259C146024833 @default.
- W2790377259 hasConceptScore W2790377259C147080431 @default.
- W2790377259 hasConceptScore W2790377259C162996421 @default.
- W2790377259 hasConceptScore W2790377259C192562407 @default.
- W2790377259 hasConceptScore W2790377259C198531522 @default.
- W2790377259 hasConceptScore W2790377259C2776459999 @default.
- W2790377259 hasConceptScore W2790377259C41008148 @default.
- W2790377259 hasConceptScore W2790377259C520434653 @default.
- W2790377259 hasConceptScore W2790377259C62520636 @default.
- W2790377259 hasConceptScore W2790377259C67649825 @default.
- W2790377259 hasConceptScore W2790377259C76155785 @default.
- W2790377259 hasConceptScore W2790377259C81793267 @default.
- W2790377259 hasConceptScore W2790377259C97355855 @default.
- W2790377259 hasLocation W27903772591 @default.
- W2790377259 hasOpenAccess W2790377259 @default.
- W2790377259 hasPrimaryLocation W27903772591 @default.
- W2790377259 hasRelatedWork W2033761063 @default.
- W2790377259 hasRelatedWork W2056500845 @default.
- W2790377259 hasRelatedWork W2081497068 @default.
- W2790377259 hasRelatedWork W2119911240 @default.
- W2790377259 hasRelatedWork W2133548135 @default.
- W2790377259 hasRelatedWork W2274527195 @default.
- W2790377259 hasRelatedWork W2730692757 @default.
- W2790377259 hasRelatedWork W2898321848 @default.
- W2790377259 hasRelatedWork W2953399771 @default.
- W2790377259 hasRelatedWork W2981781077 @default.
- W2790377259 hasRelatedWork W2982355700 @default.
- W2790377259 hasRelatedWork W3111731330 @default.
- W2790377259 hasRelatedWork W2223019713 @default.
- W2790377259 hasRelatedWork W2243830456 @default.
- W2790377259 hasRelatedWork W2818453080 @default.
- W2790377259 hasRelatedWork W2855498690 @default.
- W2790377259 hasRelatedWork W2857716697 @default.
- W2790377259 hasRelatedWork W2926520723 @default.
- W2790377259 hasRelatedWork W3147060865 @default.
- W2790377259 hasRelatedWork W3150510049 @default.
- W2790377259 isParatext "false" @default.
- W2790377259 isRetracted "false" @default.
- W2790377259 magId "2790377259" @default.
- W2790377259 workType "article" @default.