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- W2791110902 abstract "This paper demonstrates the increased light absorption efficiency of semiconducting atom probe tips resulting from focused-ion-beam (FIB) preparation. We use transmission electron microscopy to show that semiconducting tips prepared with FIB are surrounded with an amorphized shell. Photomodulated optical reflectance measurements then provide evidence that FIB-induced damage leads to an increase in both sub- and supra-bandgap light absorption efficiency. Using laser-assisted atom probe tomography (La-APT) measurements, we finally show that, for a nanoscale tip geometry, the laser-induced heating of a tip during La-APT is enhanced by the FIB preparation. We conclude that, upon supra-bandgap illumination, the presence of a FIB-amorphized surface dramatically increases the light-induced heat generation inside semiconducting tips during La-APT. Furthermore, we also deduce that, in the intriguing case of sub-bandgap illumination, the amorphization plays a crucial role in the unexpected light absorption." @default.
- W2791110902 created "2018-03-29" @default.
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- W2791110902 date "2018-05-01" @default.
- W2791110902 modified "2023-10-18" @default.
- W2791110902 title "Laser-assisted atom probe tomography of semiconductors: The impact of the focused-ion beam specimen preparation" @default.
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- W2791110902 doi "https://doi.org/10.1016/j.ultramic.2018.03.001" @default.
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